Display device and driving method thereof

ABSTRACT

A display device in which not only a variation in a current value due to a threshold voltage but also a variation in a current value due to mobility are prevented from influencing luminance with respect to all the levels of grayscale to be displayed. After applying an initial potential for correction to a gate and a drain of a driving transistor, the gate and the drain of the driving transistor is kept connected in a floating state, and a voltage is held in a capacitor before a voltage between the gate and a source of the driving transistor becomes equal to a threshold voltage. When a voltage obtained by subtracting the voltage held in the capacitor from a voltage of a video signal is applied to the gate and the source of the driving transistor, a current is supplied to a light-emitting element. A value of an initial voltage for correction differs in accordance with the voltage of the video signal.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. application Ser. No.12/142,503, filed Jun. 19, 2008, now allowed, which claims the benefitof a foreign priority application filed in Japan as Serial No.2007-171484 on Jun. 29, 2007, both of which are incorporated byreference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a display device in which a transistoris provided for each pixel and a driving method thereof.

2. Description of the Related Art

Since display devices using light-emitting elements have highvisibility, are suitable for reduction in thickness, and do not havelimitations on viewing angles, they have attracted attention as displaydevices which can take the place of CRTs (cathode ray tubes) or liquidcrystal display devices. Specifically proposed structures of activematrix display devices using light-emitting elements are differentdepending on manufacturers. However, in general, at least a lightemitting element, a transistor (a switching transistor) which controlsinput of video signals to pixels, and a transistor (a drivingtransistor) which controls value of current supplied to thelight-emitting elements are provided for each pixel.

On the other hand, thin film transistors have an advantage that the thinfilm transistors can be formed over glass substrates which areinexpensive while the thin film transistors have a disadvantage thatcharacteristics such as a threshold voltage and a mobility are likely tovary compared to bulk transistors. Since the value of a current whichflows through driving transistors relates to values of a thresholdvoltage and mobility, variations in mobility and the threshold voltageare reflected to luminance of light-emitting elements in consequence.Therefore, it is an important object to propose a driving method forimproving the image quality of display devices in which current value ofdriving transistors can be corrected in expectation of variations in thethreshold voltage and mobility.

In Patent Document 1 (Japanese Published Patent Application No.2006-084899), a driving method for a display device, in which not onlythe threshold voltage but also mobility can be corrected, has beenproposed. In the driving method disclosed in Patent Document 1, during adetection period, a potential difference between a gate and a source ofa drive transistor which corresponds to a driving transistor is held ina capacitor portion before the potential difference becomes equal to thethreshold voltage. With the above-described structure, not only avariation in the threshold voltage but also a variation in the mobilitycan be prevented from influencing luminance.

SUMMARY OF THE INVENTION

However, in the driving method disclosed in Patent Document 1, althougha fluctuation in the current value due to a variation in the thresholdvoltage is corrected so as to be canceled, the fluctuation in thecurrent value of the driving transistor due to a variation in mobilityis corrected in directions of cancellation at just some level. That is,in the driving method described above, the fluctuation in the currentvalue of the driving transistor due to the variation in the mobility isnot corrected adequately to be canceled. Hereinafter, this will bedescribed specifically.

A current I_(d) which flows through a light-emitting element isrepresented by kμ (Vgs−Vth)²/2. Note that k is a constant determined inaccordance with the channel length, channel width, and gate capacitanceof a driving transistor; Vgs of the driving transistor corresponds to apotential difference between a gate and a source of the drivingtransistor; and Vth corresponds to the threshold voltage of the drivingtransistor. Therefore, in the case where correction is not performed, asmobility μ increases, the current Id which flows through thelight-emitting element also increases, whereas as the mobility μdecreases, the current Id which flows through the light-emitting elementalso decreases. In the case of the driving method disclosed in PatentDocument 1, during the detection period, a voltage Va generated betweenthe gate and the source of the driving transistor has a value which isobtained by adding an offset voltage Vb to the threshold voltage Vth.During a light-emitting period which comes after the detection period, avalue which is obtained by subtracting the voltage Va from a voltageVsig of a video signal is the gate voltage Vgs of the drivingtransistor. Therefore, the current Id during the light-emitting periodis represented by kμ(Vsig−Va−Vth)²/2. Note that the voltage Va isrepresented by Vb−Vth and the current Id is represented by Formula 1below.Id=kμ(Vsig−Vb)²/2  (Formula 1)

According to Formula 1, it is apparent that the fluctuation in thecurrent value due to the variation in the threshold voltage Vth iscanceled even if the threshold voltage Vth varies. On the other hand,the offset voltage Vb has a negative value when the driving transistoris a p-channel transistor, and the smaller the mobility μ becomes, thelarger an absolute value of the offset voltage Vb becomes, whereas thelarger the mobility μ becomes, the smaller the absolute value of theoffset voltage Vb becomes. Therefore, Vb functions as a correction termfor correcting a variation in the current Id due to the mobility μduring the light-emitting period; a decrease in the current Id can besuppressed even if the mobility μ decreases, whereas an increase in thecurrent Id can be suppressed even if the mobility μ increases.

When the current Id which flows through the driving transistor duringthe detection period is denoted by Iref, the offset voltage Vb isrepresented by {2/ref/(kμ)}^(1/2)+Vth. That is, although Vb functions asthe correction term as described above, Vb does not completely correctthe variation. In the case where a high level of grayscale is displayed,a difference between the potential Vsig and a reference potential is bigand a coefficient of the mobility μ becomes large in Formula 1.Therefore, the fluctuation of the current value is effectively correctedby the correction term. However, in the case where a low level ofgrayscale is displayed, because of the correction term Vb which is notinfluenced by the potential Vsig, the current Id does not converge on 0even if the difference between the potential Vsig and the referencepotential becomes small. Therefore, in the case where a low level ofgrayscale is displayed, there is a problem in that a variation inluminance is caused by the mobility μ due to the correction term.

In view of the above-mentioned problems, an object of the presentinvention is to prevent luminance from being influenced by not only avariation in a current value due to a threshold voltage but also avariation in the current value due to mobility.

In order to correct not only a variation in the current value due to thethreshold voltage but also a variation in the current value due tomobility, with respect to all the levels of grayscale, the presentinvention is driven as changing the value of a correction term inaccordance with the value of a potential of a video signal. That is,when a high level of grayscale is displayed, an absolute value of acorrection term of mobility μ is increased, whereas the absolute valueof the correction term of the mobility μ is decreased when a low levelof grayscale is displayed.

Specifically, in a driving method of the present invention, after apotential for resetting (an initial potential for correction) is appliedto a gate and a drain of a driving transistor, the gate and the drain ofthe driving transistor are kept connected and set to be in a floatingstate for a given period, so that a voltage (a voltage for correction)which functions as a correction term for correcting the thresholdvoltage and mobility is generated between the gate and a source of thedriving transistor. The voltage for correction is held in a capacitor.The given period for obtaining the voltage for correction is a periodfrom a time when the gate and the drain of the driving transistor towhich the initial potential for correction is applied comes to be in afloating state to a time before a potential difference between the gateand the source of the driving transistor becomes equal to the thresholdvoltage. The value of the voltage for correction is set to be varied inaccordance with a potential of a video signal which is to be input to apixel. That is, in the case where a difference between the followingpotential of the video signal to be input and a reference potential isbig, an initial potential for correction which makes the absolute valueof the voltage for correction large is applied to a pixel; and in thecase where the difference between the potential of the video signal tobe input to the pixel and the reference potential is small, the initialpotential for correction which makes the absolute value of the voltagefor correction small is applied to the pixel. With the above-describedstructure, when a high level of grayscale is displayed, the differencebetween the potential of the video signal and the reference potential isbig, whereby the absolute value of the voltage for correction is alsolarge. When a low level of grayscale is displayed, the differencebetween the potential of the video signal and the reference potential issmall, whereby the absolute value of the voltage for correction is alsosmall. After the voltage for correction is obtained, when grayscale isdisplayed in response to the video signal, a potential obtained bysubtracting the voltage for correction from the potential of the videosignal is applied to the gate of the driving transistor. A current whichcorresponds to a gate voltage of the driving transistor is supplied to alight-emitting element and the grayscale is displayed.

In order to perform the above-described driving method, in a displaydevice of the present invention, a pixel includes at least alight-emitting element, a transistor (a switching transistor) configuredto sample a video signal, a transistor (driving transistor) configuredto control a value of a current supplied to the light-emitting element,a transistor configured to control connection between a gate and a drainof the driving transistor, a transistor configured to controlapplication of an initial potential for correction to the gate of thedriving transistor, a transistor configured to select whether the drainof the driving transistor is set to be in a floating state or not, and acapacitor for holding a voltage between the gate and a source of thedriving transistor. Further, the display device of the present inventionincludes a driver circuit configured to determine the initial potentialfor correction in accordance with the sampled potential of the videosignal and to input the initial potential for correction to the pixel.

In the present invention, with the above-described structure, the valueof a voltage for correction which functions as a correction term ischanged in accordance with a potential of a video signal. That is, whena high level of grayscale is displayed, an initial potential forcorrection which makes the absolute value of the voltage for correctionlarge is applied to a pixel; and when a low level of grayscale isdisplayed, the initial potential for correction which makes the absolutevalue of the voltage for correction small is applied to the pixel. Inthis manner, when a value of the voltage for correction is changed inaccordance with the potential of the video signal, correction can beperformed so as to make a current Id closer to 0 even when the level ofgrayscale is lowered, that is, even when a difference between thepotential of the video signal and a reference potential is small.Therefore, not only in the case where a high level of grayscale isdisplayed but also in the case where a low level of grayscale isdisplayed, a fluctuation in a current value of a driving transistor dueto a variation in mobility can be suppressed, so that a variation inluminance due to the fluctuation can be suppressed.

Therefore, the present invention can adequately prevent not only avariation in a current value due to the threshold voltage but also avariation in a current value due to mobility from influencing luminance,with respect to all the levels of grayscale to be displayed.

BRIEF DESCRIPTION OF THE DRAWINGS

In the accompanying drawings;

FIG. 1A is block diagram illustrating a structure of a display deviceand FIG. 1B is a circuit diagram of a pixel included in a display deviceof the present invention;

FIGS. 2A to 2C are diagrams illustrating configurations of connectionsin a pixel in respective periods;

FIG. 3 is a diagram illustrating a time change of a gate voltage Vgs;

FIG. 4 is a diagram illustrating a time change of a gate voltage Vgs;

FIGS. 5A and 5B are a circuit diagram and a timing chart of a pixelincluded in a display device of the present invention, respectively;

FIGS. 6A and 6B are a circuit diagram and timing chart of a pixelincluded in a display device of the present invention, respectively;

FIG. 7 is a block diagram illustrating a structure of a display deviceof the present invention;

FIG. 8 is a block diagram illustrating a structure of a display deviceof the present invention;

FIG. 9 is a diagram illustrating timings when an initialization period,a correction period, and a display period come in one frame period;

FIG. 10 is a block diagram illustrating a structure of a signal linedriver circuit included in a display device of the present invention;

FIGS. 11A to 11C are diagrams illustrating a manufacturing method of adisplay device of the present invention;

FIGS. 12A to 12C are diagrams illustrating the manufacturing method ofthe display device of the present invention;

FIGS. 13A and 13B are diagrams illustrating the manufacturing method ofthe display device of the present invention;

FIGS. 14A to 14D are diagrams illustrating a manufacturing method of adisplay device of the present invention;

FIGS. 15A to 15C are diagrams illustrating the manufacturing method ofthe display device of the present invention;

FIG. 16A is a top view of a display device of the present invention andFIG. 16B is a cross-sectional view of the display device of the presentinvention; and

FIGS. 17A to 17C each illustrates an electronic device using a displaydevice of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Hereinafter, embodiment modes of the present invention will be describedwith reference to the drawings. However, the present invention can beembodied in many different modes and it is easily understood by thoseskilled in the art that modes and details can be variously changedwithout departing from the scope and the spirit of the presentinvention. Therefore, the present invention should not be limited to thedescriptions of the embodiment modes below.

(Embodiment Mode 1)

FIG. 1A is a block diagram of a display device of the present invention.The display device of the present invention includes a pixel 101, asignal line driver circuit 102 which applies a potential Vsig of a videosignal to the pixel 101, and a reset line driver circuit 103 whichapplies an initial potential Vres for correction to the pixel 101 beforethe potential Vsig of the video signal is applied to the pixel 101. Thepixel 101 includes at least a light-emitting element 104 which displaysgrayscale in accordance with a value of a current supplied and a drivingtransistor 105 which controls the value of the current supplied to thelight-emitting element 104.

The initial potential Vres for correction applied to the pixel 101 isapplied to a gate (G) and a drain (D) of the driving transistor 105. Inaddition, a potential which is obtained by subtracting a voltage forcorrection obtained by the initial potential Vres for correction fromthe potential Vsig of the video signal applied to the pixel 101 isapplied to the gate (G) of the driving transistor 105. In accordancewith voltages of the gate (G) and a source (S) of the driving transistor105, the driving transistor 105 controls the value of the current to besupplied to the light emitting element 104.

Note that in FIG. 1A, although a case where the driving transistor 105is a p-channel transistor is illustrated, the present invention is notlimited thereto. The driving transistor 105 may be an n-channeltransistor.

FIG. 1B is a circuit diagram illustrating a more specific structure ofthe pixel 101 in the case where the driving transistor 105 is thep-channel transistor. The pixel 101 includes at least a switchingtransistor 106 which samples the video signal having the potential Vsig,a transistor 107 which controls connection between a gate and a drain ofthe driving transistor 105, a transistor 108 which controls applicationof the initial potential Vres for correction to the gate of the drivingtransistor 105, a transistor 109 which selects whether the drain of thedriving transistor 105 is set to be in a floating state or not, and acapacitor 110 for holding a voltage between the gate and a source of thedriving transistor 105, in addition to the light-emitting element 104and the driving transistor 105.

In FIG. 1B, the switching transistor 106 and the transistors 107 to 109are simply shown as switches. Note that each of the switching transistor106 and the transistor 107 to 109 functions as a switching device.Therefore, as each of the switching transistor 106 and the transistors107 to 109, a plurality of transistors may be used instead of a singletransistor, or other switching devices may be used. Switching devicesare devices which can control a resistance value between two terminalsor select conduction or non-conduction between two terminals.

In the display device of the present invention, a thin film transistorwhich includes an amorphous semiconductor film, a polycrystallinesemiconductor film, or a microcrystalline semiconductor film as anactive layer can be used. Alternatively, a thin film transistor whichincludes an SOI (silicon on insulator) as an active layer can be used.

Next, operations of the pixel 101 included in the display device of thepresent invention will be described with reference to FIGS. 2A to 2C.Operations of the display device of the present invention can be dividedinto an operation of initializing charge held in the capacitor 110 byusing the initial potential Vres for correction, an operation of holdingthe voltage Vr for correction obtained by the initial potential Vres forcorrection in the capacitor 110, and an operation of displayinggrayscale by the light-emitting element 104 by using the potential Vsigof the video signal.

First, the operation of initializing the charge held in the capacitor110 will be described. In the pixel 101, during a period (aninitialization period) of initializing the charge held in the capacitor110, the switching transistor 106 is turned on, the transistor 107 isturned on, the transistor 108 is turned on, and the transistor 109 isturned off. Then, a power supply potential VDD is applied to the sourceof the driving transistor 105. The power supply potential VDD is alsoapplied to one of electrodes of the capacitor 110 through the switchingtransistor 106.

FIG. 2A shows a relation of connection between the driving transistor105 and the capacitor 110 in the pixel 101 shown in FIG. 1B during theinitialization period. As shown in FIG. 2A, during the initializationperiod, the gate and the drain of the driving transistor 105 areconnected to each other and the initial potential Vres for correction isapplied to the gate and the drain of the driving transistor 105. Inaddition, the power supply potential VDD is applied to the one electrodeof the capacitor 110. The gate of the driving transistor 105 isconnected to the other electrode of the capacitor 110 and the initialpotential Vres for correction is applied to the gate of the drivingtransistor 105 and the other electrode of the capacitor 110.

Note that in this embodiment mode, since the case where the drivingtransistor 105 is a p-channel transistor is shown, the power supplypotential VDD (VDD>Vres) is employed. In the case where the drivingtransistor 105 is an n-channel transistor, the power supply potentialVSS (Vres>VSS) is employed.

In the present invention, the value of the initial potential Vres forcorrection is changed in accordance with the value of the potential Vsigof the video signal applied to the pixel 101 in a following displayperiod. That is, in the case where a high level of grayscale isdisplayed, the initial potential for correction which makes the absolutevalue of the voltage Vr for correction large is applied to the pixel;and in the case where a low level of grayscale is displayed, the initialpotential for correction which makes the absolute value of the voltageVr for correction small is applied to the pixel.

A voltage (a gate voltage) Vgs between the gate and the source of thedriving transistor 105 during the initialization period is (Vres−VDD).In addition, a drain current Id of the driving transistor 105 isobtained by Formula 2 below. Note that k is a constant determined inaccordance with the channel length, the channel width, and the gatecapacitance of the driving transistor 105, μ corresponds to the mobilityof the driving transistor 105 and Vth corresponds to the thresholdvoltage of the driving transistor 105.Id=kμ(Vres−VDD−Vth)²  (Formula 2)

Next, the operation of holding the voltage Vr for correction in thecapacitor 110 will be described. In the pixel 101, during a period (acorrection period) of holding the voltage Vr in the capacitor 110, theswitching transistor 106 is turned on, the transistor 107 is turned on,the transistor 108 is turned off, and the transistor 109 is turned off.Then, the power supply potential VDD is applied to the source of thedriving transistor 105. The power supply potential VDD is also appliedto the one of electrodes of the capacitor 110 through the switchingtransistor 106.

FIG. 2B shows a relation of connection between the driving transistor105 and the capacitor 110 in the pixel 101 shown in FIG. 1B during thecorrection period. As shown in FIG. 2B, during the correction period,the gate and the drain of the driving transistor 105 are connected toeach other and are in a floating state. In addition, the power supplypotential VDD is applied to the one of electrodes of the capacitor 110.The gate of the driving transistor 105 is connected to the otherelectrode of the capacitor 110.

During the correction period, since the gate and the drain of thedriving transistor 105 are in a floating state, the drain current of thedriving transistor 105 gradually approaches to 0. When the correctionperiod is long enough, the gate voltage Vgs of the driving transistor105 ultimately converges on the threshold voltage Vth. However, in thepresent invention, before the drain current becomes 0, that is, beforethe gate voltage Vgs converges on the threshold voltage Vth, thetransistor 107 is turned off and the gate and the drain of the drivingtransistor 105 are disconnected to finish the correction period. Then, avoltage between the gate and the source of the driving transistor 105when the correction period is over, that is, the voltage obtained byadding the voltage Vr for correction to the threshold voltage Vth isheld in the capacitor 110.

FIG. 3 shows a time change of the gate voltage Vgs when the gate and thedrain of the driving transistor 105 are in a floating state after theinitialization period. As shown in FIG. 3, the gate voltage of thedriving transistor 105 during the initialization period is|Vgs|=|Vres−VDD|. After the initialization period is over, when the gateand the drain of the driving transistor 105 come to be in a floatingstate, |Vgs| gradually decreases to be closer to |Vth|, as representedby a solid line. In the present invention, before |Vgs| converges on|Vth| as represented by a dashed line, the correction period is overwhen |Vgs|=|Vr+Vth| and the transistor 107 is turned off. Therefore, theabsolute value of the gate voltage Vgs held in the capacitor 110 is|Vr+Vth|. In addition, the drain current Id of the driving transistor105 is represented by Formula 3 below.Id=kμVr²  (Formula 3)

Further, in the present invention, the value of the initial potentialVres for correction is changed in accordance with the value of thepotential Vsig of the video signal applied to the pixel 101 in afollowing display period. If the correction period is a fixed period,the value of the voltage Vr for correction is varied depending on thevalue of the initial potential Vres for correction.

FIG. 4 shows a time change of the gate voltage Vgs when an initialpotential Vres1 for correction and an initial potential Vres2 forcorrection having different values are applied to a pixel during theinitialization period and then the gate and the drain of the drivingtransistor 105 come to be in a floating state. Note that|Vres1−VDD|>|Vres2−VDD|.

As shown in FIG. 4, when the initial potential Vres1 for correction isemployed during the initialization period, the gate voltage of thedriving transistor 105 is |Vgs|=|Vres1−VDD|. After the initializationperiod is over, when the gate and the drain of the driving transistor105 come to be in a floating state, |Vgs| gradually decreases to becloser to |Vth|, as represented by a solid line 401. In the presentinvention, since the correction period is over before |Vgs| converges on|Vth| as represented by a dashed line, the transistor 107 is turned offat the time when |Vgs|=|Vr1+Vth|. Therefore, the absolute value of thegate voltage Vgs held in the capacitor 110 is |Vr|+Vthl.

On the other hand, as shown in FIG. 4, when the initial potential Vres2for correction is employed during the initialization period, the gatevoltage of the driving transistor 105 is |Vgs|=|Vres2−VDD|. After theinitialization period is over, when the gate and the drain of thedriving transistor 105 come to be in a floating state, |Vgs| graduallydecreases to be closer to |Vth|, as represented by a solid line 402. Inthe present invention, since the correction period is over before |Vgs|converges on |Vth| as represented by a dashed line, the transistor 107is turned off at the time when |Vgs|=|Vr2+Vth|. Therefore, the absolutevalue of the gate voltage Vgs held in the capacitor 110 is |Vr2+Vth|.

Since |Vres1−VDD|>|Vres2−VDD|, when the correction period is a fixed,|Vr1>|Vr2|. Therefore, comparing the solid lines 401 and 402 shown inFIG. 4, it is obvious that in the case of the initial potential Vres1for correction, |Vgs| at the time when the correction period is over ishigher than |Vgs| at the time when the correction period is over in thecase of the initial potential Vres2 for correction.

Next, the operation of displaying grayscale by the light-emittingelement 104 by using the potential Vsig of the video signal will bedescribed. In the pixel 101, during a period (a display period) ofdisplaying grayscale, the switching transistor 106 is turned on, thetransistor 107 is turned off, the transistor 108 is turned off, and thetransistor 109 is turned on. The power supply potential VDD is appliedto the source of the driving transistor 105. The potential Vsig of thevideo signal is applied to the one of electrodes of the capacitor 110through the switching transistor 106.

FIG. 2C shows a relation of connection of the driving transistor 105,the capacitor 110, and the light-emitting element 104 in the pixel 101shown in FIG. 1B during the display period. As shown in FIG. 2C, duringthe display period, the potential Vsig of the video signal is applied tothe one of electrodes of the capacitor 110, and the other electrode ofthe capacitor 110 is connected to the gate of the driving transistor105. Since the charge stored in the capacitor 110 during the correctionperiod is held, a potential obtained by subtracting Vr+Vth from thepotential Vsig is applied to the gate of the driving transistor 105.Therefore, the gate voltage Vgs of the driving transistor 105corresponds to Vsig−Vr−Vth−VDD. In addition, the drain current Id of thedriving transistor 105 is represented by Formula 4 below.Id=kμ(VDD−Vsig+Vr)²  (Formula 4)

According to Formula 4, it is apparent that in the display device of thepresent invention, a fluctuation in the current value due to a variationin the threshold voltage Vth is canceled even if the threshold voltageVth varies.

Moreover, the voltage Vr for correction has a negative value when thedriving transistor is a p-channel transistor, and the smaller themobility μ becomes, the larger the absolute value of the voltage Vr forcorrection becomes, whereas the larger the mobility μ becomes, thesmaller the absolute value of the voltage Vr for correction becomes.Therefore, Vr functions as a correction term for correcting a variationin the current Id due to the mobility μ during a light-emitting period;a decrease in the current Id is suppressed even if the mobility μdecreases, whereas an increase in the current Id can be suppressed evenif the mobility μ increases.

Note that the value of the initial potential for correction may bechanged in stages or consecutively in accordance with the value of thepotential of the video signal. In the former case, one of a plurality ofinitial potentials for correction may be selected by a reset line drivercircuit and then applied to a pixel. In the latter case, an initialpotential for correction which has an analog value can be applied to thepixel from the reset line driver circuit.

When the current Id which flows through the driving transistor duringthe correction period is denoted by Iref, the voltage Vr for correctionis represented by {2/ref/(kμ)}^(1/2). That is, although Vr functions asthe correction term as described above, Vr does not completely correctthe variation.

However, comparing the amounts of the drain current Id of the drivingtransistor during the display period in the case where |Vgs| held in thecapacitor 110 is |Vr|+Vth| and in the case where |Vgs| held in thecapacitor 110 is |Vr2+Vth| at the time when the correction period isover, |Id1|=|kμ(VDD−Vsig+Vr1)²|>|Id2|−|kμ(VDD−Vsig+Vr2)²| according toFormula 4. That is, as described in the present invention, when a highlevel of grayscale is displayed, the drain current Id of the drivingtransistor during the display period can be increased by making adifference between the initial potential Vres for correction and areference potential big. On the contrary, when a low level of grayscaleis displayed, the drain current Id of the driving transistor during thedisplay period can be decreased by making the difference between theinitial potential Vres for correction and the reference potential small.

In the present invention, when a high level of grayscale is displayed,since the difference between the potential Vsig and the referencepotential is big and a coefficient of the mobility μ in Formula 4becomes large, the fluctuation of the current value can be effectivelycorrected by the correction term Vr1. On the other hand, when a lowlevel of grayscale is displayed, since the absolute value of thecorrection term Vr2 can be made smaller than that of the correction termVr1, the current Id can be made closer to 0 as the difference betweenthe potential Vsig and the reference potential becomes small. Therefore,not only in the case of displaying a high level of grayscale but also inthe case of displaying a low level of grayscale, the fluctuation in thecurrent value of the driving transistor due to the variation in themobility can be suppressed and a variation in luminance due to thefluctuation can be suppressed.

Note that in order to correct the variation in the current value of thedriving transistor due to the variation in the mobility μ moreprecisely, the value of the initial potential Vres for correction isdetermined in accordance with the value of the potential Vsig of thevideo signal so as to make A on the left side the closest to 0 inFormula 5. Note that in Formula 5, t1 is a length of the correctionperiod, μ is ideal mobility in the case of no variation or averagedmobility of the driving transistors, and C is the capacitance value ofthe capacitor 110. In addition, k=(W/L)×μ×C_(ox), L and W are thechannel length and the channel width of the driving transistor,respectively, and C_(ox) is gate capacitance per unit area of thedriving transistor.

$\begin{matrix}{A = {t_{1} + {\frac{k\;\mu}{2C}\left( {t_{1} + {\frac{2C}{k\;\mu} \times \frac{1}{{VDD} - {Vth} - {Vres}}}} \right)^{2} \times {Vsig}} - {\frac{2C}{k\;\mu} \times \frac{1}{{VDD} - {Vth} - {Vres}}}}} & \left\lbrack {{Formula}\mspace{14mu} 5} \right\rbrack\end{matrix}$

In the present invention, as for all the levels of grayscale to bedisplayed, not only a variation in a current value due to a thresholdvoltage but also a variation in a current value due to mobility isadequately prevented from influencing luminance.

(Embodiment Mode 2)

In this embodiment mode, a specific structure and operation of a pixelincluded in a display device of the present invention will be described.

FIG. 5A shows a circuit diagram of a pixel in this embodiment mode. Apixel 200 shown in FIG. 5A includes, in addition to a light-emittingelement 201 and a driving transistor 202, a switching transistor 203which samples a video signal having the potential Vsig, a transistor 204which controls connection between a gate (G) and a drain (D) of thedriving transistor 202, a transistor 205 which controls application ofthe initial potential Vres for correction to the gate (G) of the drivingtransistor 202, a transistor 206 which selects whether the drain of thedriving transistor 202 is set to be in a floating state or not, acapacitor 207 for holding a voltage between the gate and a source of thedriving transistor 202 during the correction period, and a capacitor 208for holding a potential difference between the potential of the videosignal and a reference potential during the display period.

Moreover, in this embodiment mode, the pixel 200 includes a signal lineSi (i is any one of 1 to x) for supplying the potential Vsig of thevideo signal or the power supply potential VDD to the pixel 200, a resetline R1 (i is any one of 1 to x) for supplying the initial potentialVres for correction to the pixel 200, and a power supply line Vi (i isany one of 1 to x) for supplying the power supply potential VDD to thepixel 200.

One of a source and a drain of the switching transistor 203 is connectedto the signal line Si and the other of the source and the drain of theswitching transistor 203 is connected to one of electrodes of thecapacitor 207 and one of electrodes of the capacitor 208. The otherelectrode of the capacitor 208 is connected to the power supply line Vi.The other electrode of the capacitor 207 is connected to the gate of thedriving transistor 202. The source of the driving transistor 202 isconnected to the power supply line Vi. Moreover, the transistor 206 isconnected in series between a drain of the driving transistor 202 andthe light-emitting element 201. One of a source and a drain of thetransistor 205 is connected to the reset line R1, and the other of thesource and the drain of the transistor 205 is connected to the gate ofthe driving transistor 202. Further, one of a source and a drain of thetransistor 204 is connected to the gate of the driving transistor 202,and the other of the source and the drain of the transistor 204 isconnected to the drain of the driving transistor 202.

Further, in this embodiment mode, the pixel 200 includes a scanning lineGaj (j is any one of 1 to y) connected to the gate of the switchingtransistor 203, a scanning line Gbj (j is any one of 1 to y) connectedto the gate of the transistor 205, a scanning line Gcj (j is any one of1 to y) connected to the gate of the transistor 204, and a scanning lineGdj (j is any one of 1 toy) connected to the gate of the transistor 206.

Note that in FIG. 5A, although a case where the driving transistor 202is a p-channel transistor is shown as an example, the present inventionis not limited thereto. The driving transistor 202 may be an n-channeltransistor. However, since the example in which the driving transistor202 is a p-channel transistor is described in this embodiment mode, thepower supply potential VDD (VDD>Vres) is employed. In the case where thedriving transistor 202 is an n-channel transistor, the power supplypotential VSS (Vres>VSS) is employed.

Moreover, in FIG. 5A, although a case where the switching transistor203, the transistor 204, and the transistor 205 are n-channeltransistors and the transistor 206 is a p-channel transistor isillustrated, the present invention is not limited thereto. The switchingtransistor 203, and the transistors 204 to 206 may be either p-channeltransistors or n-channel transistors.

FIG. 5B is a timing chart of potentials applied to the scanning lineGaj, the scanning line Gbj, the scanning line Gcj, the scanning lineGdj, a signal line S1, a signal line S2, a signal line S3, a reset lineR1, a reset line R2, and a reset line R3.

First, during the initialization period, since a high level potential isapplied to the scanning line Gaj, the scanning line Gbj, the scanningline Gcj, and the scanning line Gdj, the switching transistor 203 isturned on, the transistor 204 is turned on, the transistor 205 is turnedon, and the transistor 206 is turned off. The power supply potential VDDis applied to the signal line S1, the signal line S2, and the signalline S3. The initial potentials Vres1, Vres2, and Vres3 for correctionare applied to the reset line R1, the reset line R2, and the reset lineR3, respectively. Note that in this embodiment mode, an example is shownin which |VDD−Vres1|<|VDD−Vres2|<|VDD−Vres3|. A potential differencebetween the initial potential for correction and the power supplypotential VDD is held in the capacitor 207.

Next, during the correction period, since a high-level potential isapplied to the scanning line Gaj, the scanning line Gcj, and thescanning line Gdj and a low-level potential is applied to the scanningline Gbj, the switching transistor 203 is turned on, the transistor 204is turned on, the transistor 205 is turned off, and the transistor 206is turned off. The power supply potential VDD is kept being applied tothe signal line S1, the signal line S2, and the signal line S3. Theinitial potentials Vres1, Vres2, and Vres3 for correction are kept beingapplied to the reset line R1, the reset line R2, and the reset line R3,respectively. During the correction period, charge stored in thecapacitor 207 is discharged as time passes. Therefore, ultimately, thegate voltage Vgs which corresponds to the initial potentials Vres1,Vres2, and Vres3 for correction is held in the capacitor 207.Specifically, when the initial potential Vres1 for correction is appliedto the pixel, the gate voltage Vgs to be held in the capacitor 207 justbefore the correction period is over is |Vr1+Vth|. When the initialpotential Vres2 for correction is applied to the pixel, the gate voltageVgs to be held in the capacitor 207 just before the correction period isover is |Vr2+Vth|. Moreover, when the initial potential Vres3 forcorrection is applied to the pixel, the gate voltage Vgs to be held inthe capacitor 207 just before the correction period is over is|Vr3+Vth|. Note that since |VDD−Vres1|<|VDD−Vres2|<|VDD−Vres3|,|Vr1+Vth|<|Vr2+Vth|<|Vr3+Vth|.

Next, during a writing period included in the display period, since ahigh-level potential is applied to the scanning line Gaj and thescanning line Gdj and a low-level potential is applied to the scanningline Gbj and the scanning line Gcj, the switching transistor 203 isturned on, the transistor 204 is turned off, the transistor 205 isturned off, and the transistor 206 is turned off. The potential Vsig ofthe video signal is applied to the signal line S1, the signal line S2,and the signal line 53. In the present invention, the smaller adifference between the potential Vsig of the video signal applied to thepixel 200 during the display period and the reference potential (thepower supply potential VDD in this embodiment mode) becomes, the smallera difference between the initial potential Vres for correction and thereference potential (the power supply potential VDD in this embodimentmode) is made. Therefore, in the timing chart shown in FIG. 5B, whenpotentials of video signals applied to the signal line S1, the signalline S2, and the signal line S3 are denoted by Vsig1, Vsig2, and Vsig3,respectively, |VDD−Vsig1|<|VDD−Vsig2|<|VDD−Vsig3|. In this embodimentmode, since the initial potentials Vsig1, Vsig2, and Vsig3 forcorrection have negative values, Vsig1>Vsig2>Vsig3. A potentialdifference between each of the potentials Vsig1, Vsig2, and Vsig3 of thevideo signals and the reference potential (the power supply potentialVDD in this embodiment mode) is stored in the capacitor 208 in eachpixel 200.

Next, during the light-emitting period included in the display period,since a low-level potential is applied to the scanning line Gaj, thescanning line Gbj, the scanning line Gel, and the scanning line Gdj, theswitching transistor 203 is turned off, the transistor 204 is turnedoff, the transistor 205 is turned off, and the transistor 206 is turnedon. A voltage obtained by subtracting a voltage held in the capacitor207 from a potential difference between a potential of a video signalheld in the capacitor 208 and the reference potential (the power supplypotential VDD in this embodiment mode) is applied to the drivingtransistor 202 as a gate voltage. A current corresponding to the gatevoltage of the driving transistor 202 is supplied to the light-emittingelement 201 in each pixel 200, so that the light-emitting element 201performs display of grayscale.

In the present invention, the value of the initial potential Vres forcorrection is changed in accordance with the value of the potential Vsigof the video signal applied during the display period. Therefore, in thecase of displaying a high level of grayscale, a fluctuation in a currentvalue due to a variation in mobility can be effectively corrected. Inthe case of displaying a low level of grayscale, as a difference betweenthe potential Vsig and the reference potential becomes small, the draincurrent of the driving transistor can be made closer to 0. Therefore,not only in the case of displaying a high level of grayscale but also inthe case of displaying a low level of grayscale, the fluctuation in thecurrent value of the driving transistor due to the variation in themobility can be suppressed and the variation in luminance due to thefluctuation can be suppressed.

Therefore, in the present invention, as for all the levels of grayscaleto be displayed, not only a variation in a current due to a thresholdvoltage but also a variation in a current due to mobility is adequatelyprevented from influencing luminance.

Moreover, in order to correct the variation in the current value of thedriving transistor due to the variation in the mobility μ moreprecisely, the value of the initial potential Vres for correction isdetermined in accordance with the value of the potential Vsig of thevideo signal so as to make A on the left side the closest to 0 inFormula 5 described in Embodiment Mode 1.

This embodiment can be implemented in combination with theabove-mentioned embodiment mode as appropriate.

(Embodiment Mode 3)

In this embodiment mode, a more specific structure and operation of apixel included in a display device of the present invention will bedescribed.

FIG. 6A shows a circuit diagram of a pixel in this embodiment mode. Apixel 300 shown in FIG. 6A includes, in addition to a light-emittingelement 301 and a driving transistor 302, a switching transistor 303which samples a video signal having the potential Vsig, a transistor 304which controls connection between a gate (G) and a drain (D) of thedriving transistor 302, a transistor 305 which controls application ofthe initial potential Vres for correction to the gate (G) of the drivingtransistor 302, a transistor 306 which selects whether the drain of thedriving transistor 302 is set to be in a floating state or not, acapacitor 307 which holds a voltage between the gate and the source ofthe driving transistor 302 during the correction period, a capacitor 308which holds a potential difference between the potential of the videosignal and the reference potential during the display period, atransistor 309 which selects whether the source of the drivingtransistor 302 is set to be in a floating state or not, and a transistor310 which controls supply of the power supply potential VDD to one ofelectrodes of the capacitor 308.

Moreover, in this embodiment mode, the pixel 300 includes a signal lineSi (i is any one of 1 to x) for supplying the potential Vsig of thevideo signal or the power supply potential VDD to the pixel 300, a resetline Ri (i is any one of 1 to x) for supplying the initial potentialVres for correction to the pixel 300, a power supply line Vai (i is anyone of 1 to x) for supplying a power supply potential VDD to the pixel300, and a power supply line Vbi (i is any one of 1 to x) for supplyingthe power supply potential VDD′. Note that VDD′s≦VDD.

One of a source and a drain of the switching transistor 303 is connectedto the signal line Si, and the other of the source and the drain of theswitching transistor 303 is connected to one of electrodes of thecapacitor 308. The other electrode of the capacitor 308 is connected tothe gate of the driving transistor 302 and one of electrodes of thecapacitor 307. The other electrode of the capacitor 307 is connected tothe source of the driving transistor 302. One of the source and thedrain of the driving transistor 304 is connected to the gate of thedriving transistor 302, and the other of the source and the drain of thedriving transistor 304 is connected to the drain of the drivingtransistor 302. One of a source and a drain of the transistor 306 isconnected to the power supply line Vai, and the other of the source andthe drain of the transistor 306 is connected to the drain of the drivingtransistor 302. One of a source and a drain of the transistor 305 isconnected to the reset line Ri, and the other of the source and thedrain of the transistor 305 is connected to the source of the drivingtransistor 302. Further, one of a source and a drain of the transistor309 is connected to the source of the driving transistor 302, and theother of the source and the drain of the transistor 309 is connected tothe light-emitting element 301. One of a source and a drain of thetransistor 310 is connected to one of electrodes of the capacitor 308,and the other of the source and the drain of the transistor 310 isconnected to the power supply line Vbi.

Further, in this embodiment mode, the pixel 300 includes a scanning lineGaj (j is any one of 1 to y) connected to the gate of the switchingtransistor 303, a scanning line Gbj (j is any one of 1 to y) connectedto the gate of the transistor 305, a scanning line Gcj (j is any one of1 to y) connected to the gate of the transistor 304, a scanning line Gdj(j is any one of 1 to y) connected to the gate of the transistor 306,and a scanning line Gel (j is any one of 1 to y) connected to the gateof the transistor 309.

Note that in FIG. 6A, although a case where the driving transistor 302is an n-channel transistor is shown as an example, the present inventionis not limited thereto. The driving transistor 302 may be a p-channeltransistor. However, since the example in which the driving transistor302 is an n-channel transistor is shown in this embodiment mode, thepower supply potential VDD is applied to the power supply line Vai andthe power supply potential VDD′ is applied to the power supply line Vbi.Note that VDD≧VDD′>Vres. In the case where the driving transistor 302 isa p-channel transistor, the power supply potential VSS is applied to thepower supply line Vai and a power supply potential VSS′ is applied tothe power supply line Vbi. Note that Vres>VSS′≧VSS.

Moreover, in FIG. 6A, although a case where the switching transistor303, the transistor 304, the transistor 305, and the transistor 310 aren-channel transistors and the transistor 306 and the transistor 309 arep-channel transistors is illustrated, the present invention is notlimited thereto. The switching transistor 303, and the transistors 304to 306, the transistor 309, and the transistor 310 may be eithern-channel transistors or p-channel transistors.

FIG. 6B is a timing chart of potentials applied to the scanning lineGaj, the scanning line Gbj, the scanning line Gcj, the scanning lineGdj, the scanning line Gej, the signal line S1, the signal line S2, thesignal line S3, the reset line R1, the reset line R2, and the reset lineR3.

First, during the initialization period, since a low-level potential isapplied to the scanning line Gaj and the scanning line Gdj and ahigh-level potential is applied to the scanning line Gbj, the scanningline Gcj, and the sccaning line Gej, the switching transistor 303 isturned off, the transistor 304 is turned on, the transistor 305 isturned on, the transistor 306 is turned on, the transistor 309 is turnedoff, and the transistor 310 is turned on. The initial potentials Vres1,Vres2, and Vres3 for correction are applied to the reset line R1, thereset line R2, and the reset line R3, respectively. Note that in thisembodiment mode, an example is shown in which|VDD−Vres1|<|VDD−Vres2|<|VDD−Vres3|. A potential difference between theinitial potential for correction and the power supply potential VDD isheld in the capacitor 307.

Next, during the correction period, since a low-level potential isapplied to the scanning line Gaj, the scanning line Gbj, and thescanning line Gdj and a high-level potential is applied to the scanningline Gcj and the scanning line Gej, the switching transistor 303 isturned off, the transistor 304 is turned on, the transistor 305 isturned off, the transistor 306 is turned on, the transistor 309 isturned off, and the transistor 310 is turned on. The initial potentialsVres1, Vres2, and Vres3 for correction are kept being applied to thereset line R1, the reset line R2, and the reset line R3, respectively.During the correction period, charge stored in the capacitor 307 isdischarged as time passes. Therefore, ultimately, the gate voltage Vgswhich corresponds to the initial potentials Vres1, Vres2, and Vres3 forcorrection is held in the capacitor 307. Specifically, when the initialpotential Vres1 for correction is applied to the pixel, the gate voltageVgs to be held in the capacitor 307 just before the correction period isover is |Vr1+Vth|. When the initial potential Vres2 for correction isapplied to the pixel, the gate voltage Vgs to be held in the capacitor307 just before the correction period is over is |Vr2+Vth|. Moreover,when the initial potential Vres3 for correction is applied to the pixel,the gate voltage Vgs to be held in the capacitor 307 just before thecorrection period is over is |Vr3+Vth|. Note that since|VDD−Vres|I<|VDD−Vres2|<|VDD−Vres3|, |Vr1+Vth|<|Vr2+Vth|<|Vr3+Vth|. Inaddition, a potential difference between the power supply potential VDDand the power supply potential VDD′ is held in the capacitor 308.

Next, during the writing period included in the display period, since alow-level potential is applied to the scanning line Gcj and the scanningline Gdj, and a high-level potential is applied to the scanning lineGaj, the scanning line Gbj, and the scanning line Gej, the switchingtransistor 303 is turned on, the transistor 304 is turned off, thetransistor 305 is turned on, the transistor 306 is turned on, thetransistor 309 is turned off, and the transistor 310 is turned off. Thepotential Vsig of the video signal is applied to the signal line S1, thesignal line S2, and the signal line S3. In the present invention, thesmaller a difference between the potential Vsig of the video signalapplied to the pixel 300 during the display period and a referencepotential (the power supply potential VSS of a common electrode includedin the light-emitting element 301 in this embodiment mode) becomes, thesmaller the difference between the initial potential Vres for correctionand a reference potential (the power supply potential VDD in thisembodiment mode) is made. Therefore, in the timing chart shown in FIG.6B, when potentials of video signals applied to the signal line S1, thesignal line S2, and the signal line S3 are denoted by Vsig1, Vsig2, andVsig3, respectively, |Vsig1−VSS|<|Vsig2−VSS|<|Vsig3−VSS|. A potentialdifference between a potential obtained by adding the potentials Vsig1,Vsig2, or Vsig3 of the video signals to a potential difference betweenthe power supply potential VDD and the power supply potential VDD′, andthe reference potential (the power supply potential VDD in thisembodiment mode) is held in the capacitor 308 in each pixel 300.

Next, during the light-emitting period included in the display period,since a low-level potential is applied to the scanning line Gaj, thescanning line Gbj, the scanning line Gcj the scanning line Gdj, and thescanning line Gej, the switching transistor 303 is turned off, thetransistor 304 is turned off, the transistor 305 is turned off, thetransistor 306 is turned on, the transistor 309 is turned on, and thetransistor 310 is turned off. A voltage obtained by subtracting avoltage held in the capacitor 307 from a voltage held in the capacitor308 is applied to the driving transistor 302 as a gate voltage. Acurrent corresponding to the gate voltage of the driving transistor 302is supplied to the light-emitting element 301 in each pixel 300, so thatthe light-emitting element 301 performs display of grayscale.

In the present invention, the value of the initial potential Vres forcorrection is changed in accordance with the value of the potential Vsigof the video signal applied during the display period. Therefore, in thecase of displaying a high level of grayscale, a fluctuation in a currentvalue due to a variation in mobility can be effectively corrected. Inthe case of displaying a low level of grayscale, as a difference betweenthe potential Vsig and the reference potential becomes small, the draincurrent of the driving transistor can be made closer to 0. Therefore,not only in the case of displaying a high level of grayscale but also inthe case of displaying a low level of grayscale, the fluctuation in thecurrent value of the driving transistor due to the variation in themobility can be suppressed and the variation in luminance due to thefluctuation can be suppressed.

In the case where the power supply potential VDD is equal to the powersupply potential VDD′, one of the source and the drain of the transistor306 may be connected to the power supply line Vai and the other of thesource and the drain of the transistor 306 may be connected to the drainof the driving transistor 302, without providing the power supply lineVbi. In this case, the number of wirings provided for a pixel portioncan be reduced, a yield can be improved, and the aperture ratio of thepixel can be improved. In the case where the power supply potential VDDis higher than the power supply potential VDD′, the power supply lineVbi is necessary. In this case, a potential of a signal line can beprevented from becoming unnecessarily high due to the voltage held inthe capacitor 308 in the correction period when the switching transistor303 is turned on.

Moreover, in order to correct the variation in the current value of thedriving transistor due to the variation in the mobility μ moreprecisely, the initial potential Vres for correction is determined inaccordance with the value of the potential Vsig of the video signal soas to make A on the left side the closest to 0 in Formula 5 described inEmbodiment Mode 1.

Therefore, in the present invention, as for all the levels of grayscaleto be displayed, not only a variation in a current value due to athreshold voltage but also a variation in a current due to mobility isadequately prevented from influencing luminance.

This embodiment can be implemented in combination with any of theembodiment modes as appropriate.

(Embodiment Mode 4)

In this embodiment mode, an overall structure of the display device ofthe present invention will be described. In FIG. 7, a block diagram of adisplay device of this embodiment mode is shown by way of an example.

The display device shown in FIG. 7 includes a pixel portion 500 having aplurality of pixels each provided with a light-emitting element, ascanning line driver circuit 510 for selecting pixels per line, a signalline driver circuit 520 for controlling the input of a video signal topixels of a selected line, and a reset line driver circuit 530 forcontrolling input of an initial potential for correction to pixels of aselected line.

In FIG. 7, the signal line driver circuit 520 includes a shift register521, a first latch 522, a second latch 523, and a DA (digital to analog)converter 524. A clock signal S-CLK and a start pulse signal S-SP areinput to the shift register 521. The shift register 521 generates atiming signal of which pulse sequentially shifts in accordance with theclock signal S-CLK and the start pulse signal S-SP and outputs thetiming signal to the first latch 522. The order of the appearance of thepulses of the timing signal may be switched in accordance with ascanning direction switching signal.

When a timing signal is input to the first latch 522, a video signal issequentially written into and held in the first latch 522 in accordancewith a pulse of the timing signal. Video signals may be sequentiallyinput to a plurality of memory circuits included in the first latch 522;however, the plurality of memory circuits included in the first latch522 may be divided into some groups, and video signals may be input torespective groups in parallel, that is, a so-called division driving maybe performed. Note that the number of groups at this time is called adivision number. For example, in the case where a latch is divided intofour groups, division driving can be performed with four divisions.

The time until video signal writing into all of the memory circuits ofthe first latch 522 is completed is called a line period. In practice,the line period may include a period when a horizontal retrace intervalis added to the line period.

When one line period is completed, the video signals held in the firstlatch 522 are written into the second latch 523 all at once and held inaccordance with a pulse of a latch signal S-LS which is to be input tothe second latch 523. The next video signal is sequentially written intothe first latch 522 which has finished sending the video signals to thesecond latch 523, in accordance with a timing signal from the shiftregister 521 again. During this second round of the one line period, thevideo signals written into and held in the second latch 523 are input tothe DA converter 524.

The DA converter 524 converts an input digital video signal into ananalog video signal and inputs the analog video signal to each pixelincluded in the pixel portion 500 through the signal line.

Note that the signal line driver circuit 520 may use another circuitwhich can output a signal of which pulse sequentially shifts instead ofthe shift register 521.

Note that, although the pixel portion 500 is directly connected to thelower stage of the DA converter 524 in FIG. 7, the present invention isnot limited to this structure. A circuit which performs signalprocessing on the video signal output from the DA converter 524 can beprovided at a stage prior to the pixel portion 500. As examples of thecircuit which performs signal processing, a buffer which can shape awaveform and the like can be given.

Like the signal line driver circuit 520, the reset line driver circuit530 includes a shift register 531, a first latch 532, a second latch533, and a DA converter 534. A clock signal R-CLK and a start pulsesignal R-SP are input to the shift register 531. The shift register 531generates a timing signal whose pulse sequentially shifts in accordancewith the clock signal R-CLK and the start pulse signal R-SP, and outputsthe timing signal to the first latch 532. The order of the appearance ofthe pulses of the timing signal may be switched in accordance with ascanning direction switching signal. Note that the order of theappearance of the pulses of the timing signal in the reset line drivercircuit 530 is determined in accordance with the order of the appearanceof the pulses of the timing signal in the signal line driver circuit520.

When a timing signal is input to the first latch 532, a reset signal issequentially written into and held in the first latch 532 in accordancewith a pulse of the timing signal. Reset signals may be sequentiallyinput to a plurality of memory circuits included in the first latch 532;however, the plurality of memory circuits included in the first latch532 may be divided into some groups, and reset signals may be input torespective groups in parallel, that is, a so-called division driving maybe performed. Note that the number of groups at this time is called adivision number. For example, in the case where a latch is divided intofour groups, division driving can be performed with four divisions.

The time until reset signal writing into all of the memory circuits ofthe first latch 532 is completed is called a line period. In practice,the line period may include a period when a horizontal retrace intervalis added to the line period.

When one line period is completed, the reset signals held in the firstlatch 532 are written into the second latch 533 all at once and held inaccordance with a pulse of a latch signal R-LS which is to be input tothe second latch 533. The next reset signal is sequentially written intothe first latch 532 which has finished sending the reset signals to thesecond latch 533, in accordance with a timing signal from the shiftregister 531 again. During this second round of the one line period, thereset signals written into and held in the second latch 533 are input tothe DA converter 534.

The DA converter 534 converts an input digital reset signal to an analogreset signal. A potential of the analog reset signal is input as aninitial potential for correction from the DA converter 534 through thereset line to each pixel in the pixel portion 500.

Note that the reset line driver circuit 530 may use another circuitwhich can output a signal whose pulse sequentially shifts instead of theshift register 531.

Note that the pixel portion 500 is directly connected to the lower stageof the DA converter 534 in FIG. 7; however, the present invention is notlimited to this structure. A circuit which performs signal processing onthe reset signal output from the DA converter 534 may be provided at thestage prior to the pixel portion 500. As examples of the circuit whichperforms signal processing, a buffer which can shape a waveform and thelike are given.

Next, operation of the scanning line driver circuit 510 will bedescribed. In a display device of the present invention, a plurality ofscanning lines is provided for each pixel in the pixel portion 500. Thescanning line driver circuit 510 generates a selection signal and inputsthe selection signal to each of the plurality of scanning lines toselect pixels per line. When a pixel is selected by the selectionsignal, the switching transistor, a gate of which is connected to one ofthe plurality of scanning lines, is turned on and a video signal isinput to the pixel. Moreover, when the pixel is selected by theselection signal, a transistor which controls supply of the initialpotential for correction and whose gate is connected to one of theplurality of scanning lines is turned on, and a reset signal is input tothe pixel. Further, besides the above-mentioned transistors, switchingof transistors which function as switching devices and are provided forthe pixel is controlled by the selection signal.

Note that in this embodiment mode, although the example is described inwhich all the selection signals input to the plurality of scanning linesare generated in one scanning line driver circuit 510, the presentinvention is not limited thereto. The selection signals input to theplurality of scanning lines can be generated in a plurality of scanningline driver circuits 510.

Note that although the pixel portion 500, the scanning line drivercircuit 510, the signal line driver circuit 520, and the reset linedriver circuit 530 may be provided over the same substrate, any of thesemay be provided over a different substrate.

This embodiment can be implemented in combination with any of theembodiment modes as appropriate.

(Embodiment Mode 5)

In this embodiment mode, an overall structure of the display device ofthe present invention will be described. In FIG. 8, a block diagram of adisplay device of this embodiment mode is shown by way of example.

The display device of the present invention shown in FIG. 8 includes apixel portion 600 having a plurality of pixels, a scanning line drivercircuit 610 for selecting a plurality of pixels per line, a signal linedriver circuit 620 for controlling the input of a video signal to pixelsof a selected line, and a reset line driver circuit 630 for controllinginput of a reset signal to pixels of a selected line.

The signal line driver circuit 620 includes at least a shift register621, a sampling circuit 622, and a latch 623 which can store an analogsignal. A clock signal S-CLK and a start pulse signal S-SP are input tothe shift register 621. The shift register 621 generates a timing signalwhose pulse sequentially shifts in accordance with the clock signalS-CLK and the start pulse signal S-SP and inputs the timing signal tothe sampling circuit 622. The sampling circuit 622 samples video signalsfor one line period, which are input to the signal line driver circuit620, in accordance with the input timing signal. When all the videosignals for one line period are sampled, the sampled video signals areoutput and stored all at once to the latch 623 in accordance with thelatch signal S-LS. The video signals stored in the latch 623 is input tothe pixel portion 600 through the signal line.

Note that in this embodiment mode, an example is described in which allthe video signals for one line period are sampled in the samplingcircuit 622 and then, the sampled video signals are input all at once tothe latch 623 in the lower stage; however, the present invention is notlimited thereto. In the sampling circuit 622, every time when a videosignal corresponding to each pixel is sampled, the sampled video signalmay be input to the latch 623 in the lower stage without waiting for oneline period to finish.

In addition, video signals may be sampled for one pixel at one timeserially after completion of sampling of video signals for anotherpixel, or pixels in one line may be divided into several groups andvideo signals may be sampled with respect to each pixel corresponding inone group at the same time.

Note that in FIG. 8, although the pixel portion 600 is directlyconnected to the latch 623 in the lower stage, the present invention isnot limited thereto. A circuit which processes the analog video signaloutput from the latch 623 can be provided in a previous stage of thepixel portion 600. Examples of a circuit which processes a signalinclude a buffer which can shape a waveform, and the like.

Then, when a video signal is input to the pixel portion 600 from thelatch 623, the sampling circuit 622 can sample a video signalcorresponding to the next line period again at the same time.

Like the signal line driver circuit 620, the reset line driver circuit630 includes at least a shift register 631, a sampling circuit 632, anda latch 633 which can store an analog signal. A clock signal R-CLK and astart pulse signal R-SP are input to the shift register 631. The shiftregister 631 generates a timing signal whose pulse sequentially shifts,in accordance with the clock signal R-CLK and the start pulse signalR-SP, and inputs the timing signal to the sampling circuit 632. Thesampling circuit 632 samples analog reset signals for one line period,which are input to the reset line driver circuit 630, in accordance withthe input timing signal. When all the reset signals for one line periodare sampled, the sampled reset signals are output all at once to thelatch 633 in accordance with the latch signal R-LS and stored.Potentials of the reset signals stored in the latch 633 are input as theinitial potential for correction to the pixel portion 600 through thereset line.

Note that in this embodiment mode, an example is described in which allthe reset signals for one line period are sampled in the samplingcircuit 632 and then, the sampled reset signals are input all at once tothe latch 633 in the lower stage; however, the present invention is notlimited thereto. In the sampling circuit 632, every time when a resetsignal corresponding to each pixel is sampled, the sampled reset signalmay be input to the latch 633 in the lower stage without waiting for oneline period to finish.

In addition, video signals may be sampled for one pixel at one timeserially after completion of sampling of reset signals for anotherpixel, or pixels in one line may be divided into several groups andreset signals may be sampled with respect to each pixel corresponding inone group at the same time.

Note that in FIG. 8, although the pixel portion 600 is directlyconnected to the latch 633 in the lower stage, the present invention isnot limited thereto. A circuit which performs signal processing on theanalog reset signal output from the latch 633 can be provided in aprevious stage of the pixel portion 600. Examples of a circuit whichperforms signal processing include a buffer which can shape a waveformand the like.

Then, when a reset signal is input to the pixel portion 600 from thelatch 633, the sampling circuit 632 can sample a reset signalcorresponding to the next line period again at the same time.

Next, operation of the scanning line driver circuit 610 will bedescribed. In a display device of the present invention, a plurality ofscanning lines is provided for each pixel in the pixel portion 600. Thescanning line driver circuit 610 generates a selection signal and inputsthe selection signal to each of the plurality of scanning lines toselect pixels per line. When a pixel is selected by the selectionsignal, a switching transistor whose gate is connected to one of theplurality of scanning lines is turned on and a video signal is input tothe pixel. Moreover, when the pixel is selected by the selection signal,a transistor which controls supply of the initial potential forcorrection and whose gate is connected to one of the plurality ofscanning lines is turned on, and a reset signal is input to the pixel.Further, besides the above-mentioned transistors, switching oftransistors which function as switching device and are provided for thepixel is controlled by the selection signal.

Note that in this embodiment mode, although the example is described inwhich all the selection signals input to the plurality of scanning linesare generated in one scanning line driver circuit 610, the presentinvention is not limited thereto. The selection signals input to theplurality of scanning lines may be generated in a plurality of scanningline driver circuit 610.

Note that although the pixel portion 600, the scanning line drivercircuit 610, the signal line driver circuit 620, and the reset linedriver circuit 630 can be provided over the same substrate, any of thesemay be provided over a different substrate.

This embodiment can be implemented in combination with any of theembodiment modes as appropriate.

(Embodiment Mode 6)

In this embodiment mode, timing of appearance of the initializationperiod, the correction period, the display period in one frame periodwill be described with reference to FIG. 9.

FIG. 9 is a diagram showing timing of appearance of the initializationperiod, the correction period, and the display period. A horizontal axisrepresents a time, and a vertical axis represents a scanning directionof a pixel which is selected line by line by the scanning line drivercircuit.

In FIG. 9, first, during the initialization period, pixels in each lineare selected in sequence by the scanning line driver circuit. An initialpotential for correction is input from the reset line driver circuit tothe pixels in the selected line. The correction period starts in orderfrom pixels in a line in which input of the initial potential forcorrection during the initialization period is completed, and operationfor obtaining a voltage for correction starts.

When the correction period is over, the display period starts next. Thedisplay period includes the writing period and the light-emittingperiod. During the writing period, when pixels in each line are selectedin sequence by the scanning line driver circuit, an analog video signalis input to the pixels in the selected line from a signal line drivercircuit. The light-emitting period starts in order from pixels in a linein which input of the video signal during the writing period iscompleted, and display is performed in accordance with a potential ofthe video signal. The frame period includes the initialization period,the correction period, and the display period. When the display periodin the previous frame period is over, the initialization period in afollowing period starts.

This embodiment can be implemented in combination with any of theembodiment modes as appropriate.

(Embodiment Mode 7)

In this embodiment mode, the structure of the signal line driver circuitdescribed in Embodiment Mode 4 will be described more specifically.

FIG. 10 shows an example of a circuit diagram of the signal line drivercircuit. The signal line driver circuit shown in FIG. 10 includes ashift register 801, a first latch 802, a second latch 803, and a D/Aconverter 804.

The shift register 801 includes a plurality of delay flip flops (DFFs)805. The shift register 801 generates a timing signal, a pulse of whichis sequentially shifted, in accordance with a start pulse signal S-SPand a clock signal S-CLK which are input, and the timing signal is inputto the first latch 802 in the lower stage.

The first latch 802 includes a plurality of memory circuits (LATs) 806.The number of the memory circuits 806 is preferably the same as or morethan the number obtained by multiplying the number of pixels of one linein a pixel portion by the number of bits of a video signal. Note thatalthough an example in which the number of bits of the video signal isthree is described in FIG. 10, the number of bits of the video signal isnot limited thereto. The first latch 802 sequentially samples videosignals in accordance with the pulse of the input timing signal, anddata of the sampled video signals is written to the memory circuits 806.

The second latch 803 includes a plurality of memory circuits (LATs) 807.The number of the memory circuits 807 is preferably the same as or morethan the number obtained by multiplying the number of pixels of one linein the pixel portion by the number of bits of the video signal. The datawhich is written to the memory circuits 806 in the first latch 802 iswritten to and is held in the memory circuits 807 included in the secondlatch 803.

The data held in the memory circuits 807 is input as a video signal tothe DA converter 804 in the lower stage. The DA converter 804 convertsan input digital video signal into an analog video signal and inputs theanalog signal to the pixel portion in the lower stage.

In this embodiment mode, although the structure of the signal linedriver circuit is described, the reset line driver circuit may have astructure similar to that of the signal line driver circuit shown inFIG. 10. However, in the case of the reset line driver circuit, a resetsignal is employed instead of a video signal, the start pulse signalR-SP and the clock signal R-CLK are employed instead of the start pulsesignal S-SP and the clock signal S-CLK, and the latch signal R-LS isemployed instead of the latch signal S-LS.

This embodiment can be implemented in combination with any of theembodiment modes as appropriate.

[Embodiment 1]

In this embodiment, a manufacturing method of a display device of thepresent invention will be described. Although this embodimentillustrates a thin film transistor (TFT) as an exemplary semiconductorelement, a semiconductor element used in the display device of theinvention is not limited to this. For example, not only a TFT but also amemory element, a diode, a resistor, a coil, a capacitor, an inductor,or the like can be used.

First, as shown in FIG. 11A, an insulating film 701, a separation layer702, an insulating film 703, and a semiconductor film 704 are formedsequentially over a substrate 700 having heat-resisting properties. Theinsulating film 701, the separation layer 702, the insulating film 703,and the semiconductor film 704 can be formed in succession.

As the substrate 700, a glass substrate such as barium borosilicateglass or aluminoborosilicate glass, a quartz substrate, a ceramicsubstrate, or the like can be used. Further, a metal substrate includinga stainless-steel substrate or a semiconductor substrate such as asilicon substrate may be used as well. A substrate made of a syntheticresin having flexibility such as plastics which generally has theheat-resistance temperature which is lower than those of theabove-described substrates can be used as long as it can withstand theprocess temperature in a manufacturing process.

As a plastic substrate, polyester typified by polyethylene terephthalate(PET); polyether sulfone (PES); polyethylene naphthalate (PEN);polycarbonate (PC); a polyamide synthetic fiber; polyether etherketone(PEEK); polysulfone (PSF); polyether imide (PEI); polyarylate (PAR);polybutylene terephthalate (PBT); polyimide; an acrylonitrile butadienestyrene resin; poly vinyl chloride; polypropylene; poly vinyl acetate;an acrylic resin; and the like can be given.

Although the separation layer 702 is provided over the entire surface ofthe substrate 700 in this embodiment, the invention is not limitedthereto. For example, the separation layer 702 may be formed partly overthe substrate 700 by a photolithography method or the like.

The insulating films 701 and 703 are formed by using an insulatingmaterial such as silicon oxide, silicon nitride, silicon oxynitride(SiO_(x)N_(y) where x>y>0), or silicon nitride oxide (SiN_(x)O_(y) wherex>y>0) by a CVD method, a sputtering method, or the like.

The insulating film 701 and the insulating film 703 are provided toprevent an alkali metal such as Na or an alkaline earth metal containedin the substrate 700 from diffusing into the semiconductor film 704 andhaving an adverse effect on a characteristic of a semiconductor elementsuch as a TFT. Further, the insulating film 703 also has roles ofpreventing an impurity element contained in the separation layer 702from diffusing into the semiconductor film 704 and of protecting asemiconductor element in a subsequent step in which the semiconductorelement is separated from the substrate 700. Furthermore, with theinsulating film 703, the separation layer 702 can be easily separated ora semiconductor element or a wiring can be prevented from being crackingand damaged in a subsequent separation step.

Each of the insulating films 701 and 703 can be either a singleinsulating film or stacked layers of a plurality of insulating films. Inthis embodiment, a silicon oxynitride film with a thickness of 100 nm, asilicon nitride oxide film with a thickness of 50 nm, and a siliconoxynitride film with a thickness of 100 nm are stacked in this order toform the insulating film 703; however, the materials and filmthicknesses of each layer and the number of layers stacked are notlimited thereto. For example, instead of the silicon oxynitride film,which is a lower layer, a siloxane-based resin with a thickness of 0.5to 3 μm may be formed by a spin coating method, a slit coater method, adroplet discharge method, a printing method, or the like. Instead of thesilicon nitride oxide film, which is a middle layer, a silicon nitridefilm may be used. Instead of the silicon oxynitride film which is anupper layer, a silicon oxide film may be used. The thickness of eachfilm is preferably in the range of 0.05 to 3 μm and can be selected fromthat range at will.

Alternatively, the lower layer which is the closest to the separationlayer 702, the middle layer, and the upper layer of the insulating film703 may be formed of a silicon oxynitride film or a silicon oxide film,a siloxane-based resin, and a silicon oxide film, respectively.

Note that a siloxane-based resin is a resin formed from a siloxane-basedmaterial as a starting material and having the bond of Si—O—Si. Asiloxane-based resin may contain as a substituent at least one offluorine, an alkyl group, and aromatic hydrocarbon, in addition tohydrogen.

The silicon oxide film can be formed using a mixed gas of silane andoxygen, TEOS (tetraethoxysilane) and oxygen, or the like by a methodsuch as thermal CVD, plasma CVD, atmospheric pressure CVD, or biasECRCVD. In addition, a silicon nitride film can be typically formedusing a mixed gas of silane and ammonia by a plasma CVD method.Moreover, a silicon oxynitride film and a silicon nitride oxide film cantypically be formed using a mixed gas of silane and nitrogen oxide by aplasma CVD method.

As the separation layer 702, a metal film, a metal oxide film, or a filmin which a metal film and a metal oxide film are stacked can be used.The metal film and the metal oxide film can be either a single layer ora stacked structure of a plurality of layers. In addition to a metalfilm or a metal oxide film, metal nitride or metal oxynitride can alsobe used. The separation layer 702 can be formed by a sputtering methodor a CVD method such as a plasma CVD method.

Examples of metals used for the separation layer 702 include tungsten(W), molybdenum (Mo), titanium (Ti), tantalum (Ta), niobium (Nb), nickel(Ni), cobalt (Co), zirconium (Zr), zinc (Zn), ruthenium (Ru), rhodium(Rh), palladium (Pd), osmium (Os), iridium (Ir), and the like. Inaddition to such metal films, the separation layer 702 can also beformed using a film made of an alloy containing the above-describedmetal as a main component or a compound containing the above-describedmetal.

Alternatively, the separation layer 702 may be formed using a filmformed of only a silicon (Si) or a film formed of a compound containingsilicon (Si) as a main component. As a further alternative, theseparation layer 702 may be formed using a film formed of an alloy ofsilicon (Si) and any of the above-described metals. A film containingsilicon may be any of amorphous, microcrystalline, or polycrystalline.

The separation layer 702 may be either a single layer of theabove-described film or stacked layers thereof. The separation layer 702having a stack of a metal film and a metal oxide film can be formed byforming a base metal film and then, oxidizing or nitriding the surfaceof the metal film. Specifically, plasma treatment may be applied to thebase metal film in an oxygen atmosphere or a nitrogen oxide atmosphere,or thermal treatment may be applied to the metal film in an oxygenatmosphere or a nitrogen oxide atmosphere. Alternatively, the metal filmcan be oxidized by forming a silicon oxide film or silicon oxynitridefilm so as to be in contact with the base metal film. Furtheralternatively, the metal film can be nitrided by forming a siliconnitride oxide film or a silicon nitride film so as to be in contact withthe base metal film.

As a plasma treatment which oxidizes or nitrides a metal film, ahigh-density plasma treatment in which a plasma density is greater thanor equal to 1×10¹¹ cm⁻³ or preferably in the range of 1×10¹¹ cm⁻³ to9×10¹⁵ cm⁻³ and which uses a high frequency wave such as a micro wave(for example, a frequency is 2.45 GHz) may be performed.

Note that the separation layer 702 in which a metal film and a metaloxide film are stacked may be formed by oxidizing a surface of the basemetal film; however, a metal oxide film may be separately formed after ametal film has been formed. In a case of using tungsten as a metal, forexample, a tungsten film is formed as the base metal film by asputtering method, a CVD method, or the like, and then the tungsten filmis subjected to plasma treatment. Accordingly, the tungsten filmcorresponding to the metal film and a metal oxide film which is incontact with the metal film and formed of an oxide of tungsten can beformed.

Note that an oxide of tungsten is expressed by WO_(x), and x is in therange of 2 to 3. There are cases where x is 2 (WO₂), 2.5 (W₂O₅), 2.75(W₄O₁₁), 3 (WO₃), or the like. In a case of forming an oxide oftungsten, there are no particular limitations on the value of x and thevalue of x may be set based on an etching rate or the like.

It is preferable that the semiconductor film 704 be consecutively formedafter the formation of the insulating film 703 without exposure to air.The thickness of the semiconductor film 704 is 20 to 200 nm (preferably40 to 170 nm, or more preferably 50 to 150 nm). The semiconductor film704 may be an amorphous semiconductor, a semiamorphous semiconductor, ora polycrystalline semiconductor. Not only silicon but also silicongermanium can be used as the semiconductor. In the case of using silicongermanium, it is preferable that a concentration of germanium beapproximately 0.01 atomic % to 4.5 atomic %

Note that a semi-amorphous semiconductor includes a semiconductor havingan intermediate structure between an amorphous semiconductor and asemiconductor having a crystalline structure (including single crystaland polycrystal). The semi-amorphous semiconductor is a semiconductorhaving a third state which is stable in free energy, is a crystallinesubstance with a short-range order and lattice distortion, and can bedispersed in a non-single crystalline semiconductor with a grain size of0.5 to 20 nm. Raman spectrum of the semi-amorphous semiconductor filmshifts to a wave number side lower than 520 cm⁻¹, and the diffractionpeaks of (111) and (220) which are said to be derived from a siliconcrystalline lattice are observed by X-ray diffraction. Further, thesemi-amorphous semiconductor contains hydrogen or halogen of at least 1atomic % or more to terminate dangling bonds. Here, such a semiconductoris referred to as a semi-amorphous semiconductor (SAS) for convenience.When a rare gas element such as helium, argon, krypton, or neon iscontained to further increase the lattice distortion, stability can beenhanced, and a favorable semi-amorphous semiconductor can be obtained.

In addition, the SAS can be obtained by glow discharge decomposition ofa gas containing silicon. As a typical gas containing silicon, SiH₄, orSi₂H₆, SiH₂Cl₂, SiHCl₃, SiCl₄, SiF₄, or the like can be used. Further,when the gas containing silicon is diluted with hydrogen or with a gasin which one or more of rare gas elements of helium, argon, krypton, andneon are added to hydrogen, the SAS can be easily formed. The gascontaining silicon is preferably diluted at a dilution ratio in therange of 2 to 1000 times. Further, a carbide gas such as CH₄ or C₂H₆; agermanium gas such as GeH₄ or GeF₄; F₂; or the like may be mixed intothe gas containing silicon to adjust the energy bandwidth to be 1.5 to2.4 eV or 0.9 to 1.1 eV.

For example, in the case of using a gas in which H₂ is added to SiH₄ ora gas in which F₂ is added to SiH₄, the subthreshold coefficient (Svalue) of the TFT can be less than or equal to 0.35 V/dec, typically0.25 to 0.09 V/dec, and the mobility can be 10 cm²/Vsec when the TFT ismanufactured using the formed semi-amorphous semiconductor.

Note that the semiconductor film 704 may be crystallized by a knowntechnique. As the known technique of crystallization, a lasercrystallization method using a laser beam and a crystallization methodusing a catalytic element are given. Alternatively, a crystallizationmethod using a catalyst element and a laser crystallization method canbe combined. In the case of using a thermally stable substrate such asquartz for the substrate 700, it is possible to combine any of thefollowing crystallization methods: a thermal crystallization method withan electrically heated oven, a lamp anneal crystallization method withinfrared light, a crystallization method with a catalytic element, andhigh temperature annealing at about 950° C.

For example, in the case of using laser crystallization, thermaltreatment at 550° C. is applied to the semiconductor film 704 for fourhours before the laser crystallization, in order to enhance theresistance of the semiconductor film 704 to laser. By using a solidstate laser capable of continuous oscillation and irradiating thesemiconductor film 704 with laser light of a second to fourth harmonicof a fundamental wave, large grain crystals can be obtained. Typically,a second harmonic (532 nm) or a third harmonic (355 nm) of a Nd:YVO₄laser (a fundamental wave of 1064 nm) is desirably used. Specifically,laser light emitted from a continuous-wave YVO₄ laser is converted intoa harmonic by using a non-linear optical element, thereby obtaininglaser light of which output is 10 W. Then, the laser light is preferablyshaped into a rectangular shape or an elliptical shape with optics onthe irradiation surface. The power density of approximately 0.01 to 100MW/cm² (preferably, 0.1 to 10 MW/cm²) is required for the laser. Inaddition, the scan rate is set at approximately 10 to 2000 cm/sec.

Note that as a continuous oscillation gas laser, an Ar laser, a Krlaser, or the like can be used. As a continuous-wave solid-state laser,the following can be used: a YAG laser, a YVO₄ laser, a YLF laser, aYAlO₃ laser, a forsterite (Mg₂SiO₄) laser, a GdVO₄ laser, a Y203 laser,a glass laser, a ruby laser, an alexandrite laser, a Ti:sapphire laser,and the like.

As a pulse-oscillation laser, an Ar laser, a Kr laser, an excimer laser,a CO₂ laser, a YAG laser, a Y₂O₃ laser, a YVO₄ laser, a YLF laser, aYAlO₃ laser, a glass laser, a ruby laser, an alexandrite laser, aTi:sapphire laser, a copper-vapor laser, or a gold-vapor laser can beused.

The repetition rate of pulsed laser light may be set at 10 MHz orhigher, so that laser crystallization may be performed with aconsiderably higher frequency band than the normally used frequency bandin the range of several ten to several hundred Hz. It is estimated thatthe time it takes for the semiconductor film 704 to completely solidifyafter being irradiated with pulsed oscillation laser light and melted isseveral tens to several hundreds of nanoseconds. Therefore, by using theabove frequency band, the first semiconductor film 704 can be irradiatedwith a laser beam of the next pulse until the first semiconductor film704 is solidified after being melted by a laser beam of the precedingpulse. Accordingly, the solid-liquid interface in the semiconductor film704 can be moved continuously and thus, the semiconductor film 704having crystal grains that have grown in the scanning direction can beformed. Specifically, an aggregation of crystal grains each having awidth of 10 to 30 μm in the scanning direction of the crystal grains anda width of approximately 1 to 5 μm in a direction perpendicular to thescanning direction can be formed. By forming single crystals withcrystal grains that have continuously grown in the scanning direction,it is possible to form the semiconductor film 704 having few crystalgrains at least in the channel direction of a TFT.

Note that the laser crystallization may be performed by irradiation withcontinuous wave laser light of a fundamental wave and continuous wavelaser light of a harmonic in parallel or irradiation with continuouswave laser light of a fundamental wave and pulse-oscillation laser lightof a harmonic in parallel.

Laser light irradiation may be performed in an inert gas atmosphere suchas in a rare gas or nitrogen. By performing laser light irradiation inan inert gas atmosphere, roughness of a semiconductor surface caused bythe laser light irradiation can be suppressed, and variation in athreshold voltage caused by variation in an interface state density canbe suppressed.

By the above-described laser irradiation, the semiconductor film 704with enhanced crystallinity can be formed. Note that it is also possibleto use a polycrystalline semiconductor, which is formed by a sputteringmethod, a plasma CVD method, a thermal CVD method, or the like, for thesemiconductor film 704.

The semiconductor film 704 is crystallized in this embodiment; however,an amorphous semiconductor film or a microcrystalline semiconductor filmmay be subjected to a process described below directly, without beingcrystallized. A TFT formed using an amorphous semiconductor or amicrocrystalline semiconductor needs less fabrication steps than TFTsformed using a polycrystalline semiconductor. Therefore, it has anadvantage of low cost and high yield.

An amorphous semiconductor can be obtained by glow dischargedecomposition of a gas containing silicon. As examples of the gascontaining silicon, SiH₄, Si₂H₆, and the like can be given. The gascontaining silicon diluted with hydrogen or hydrogen and helium may beused.

Next, the semiconductor film 704 is subjected to channel doping, inwhich an impurity element which imparts p-type conductivity or animpurity element which imparts n-type conductivity is added at a lowconcentration. The channel doping may be performed to the wholesemiconductor film 704 or part of the semiconductor film 704. As theimpurity element which imparts p-type conductivity, boron (B), aluminum(Al), gallium (Ga), or the like can be used. As the impurity elementimparting n-type conductivity, phosphorus (P), arsenic (As), or the likecan be used. Here, boron (B) is used as the impurity element and addedat a concentration of 1×10¹⁶ to 5×10¹⁷/cm³.

Next, as shown in FIG. 11B, the semiconductor film 704 is processed(patterned) into a predetermined shape, so that island-shapedsemiconductor films 705 to 708 are formed. Then, as shown in FIG. 11C,TFTs 709 to 712 using the island-shaped semiconductor films 705 to 708are formed. Note that the TFTs 709 to 712 can be formed by a knownmethod.

Next, as shown in FIG. 12A, an insulating film 713 is formed so as tocover the TFTs 709 to 712. Although the insulating film 713 is notalways necessary, when the insulating film 713 is formed, impuritiessuch as alkali metal and alkaline earth metal are prevented fromentering the TFTs 709 to 712. Specifically, it is preferable to usesilicon nitride, silicon nitride oxide, aluminum nitride, aluminumoxide, silicon oxide, or the like as the insulating film 713. In thisembodiment, a silicon oxynitride film with a thickness of about 600 nmis used as the insulating film 713. In this case, a hydrogenation stepmay be performed after the formation of this silicon oxynitride film.

Next, an insulating film 714 is formed over the insulating film 713 soas to cover the TFTs 709 to 712. An organic material having heatresistance, such as polyimide, acrylic, benzocyclobutene, polyamide, orepoxy can be used for the insulating film 714. Alternatively, alow-dielectric constant material (Low-k material), a siloxane-basedresin, silicon oxide, silicon nitride, silicon oxynitride, siliconnitride oxide, PSG (phosphosilicate glass), BPSG (borophosphosilicateglass), alumina, or the like can be used besides the above organicmaterials. A siloxane-based resin may contain as a substituent at leastone of fluorine, an alkyl group, and aromatic hydrocarbon, in additionto hydrogen. Note that the insulating film 714 may be formed in such amanner that a plurality of insulating films formed of any of theabove-described materials is stacked.

The insulating film 714 can be formed by a CVD method, a sputteringmethod, an SOG method, spin coating, dipping, spray coating, a dropletdischarge method (an ink-jet method, screen printing, offset printing,or the like), a doctor knife, a roll coater, a curtain coater, a knifecoater, or the like depending on a material of the insulating film 714.

Next, opening portions are formed in the insulating film 713 and theinsulating film 714 such that each of the island-shaped semiconductorfilms 705 to 708 is partly exposed. Then, conductive films 725 to 732which are in contact with the island-shaped semiconductor films 705 to708 through the opening portions are formed. As a gas for etching toform the opening portions, a mixed gas of CHF₃ and He is used; however,the present invention is not limited thereto.

The conductive films 725 to 732 may be formed by a CVD method, asputtering method, or the like. Specifically, the conductive films 725to 732 can be formed using aluminum (Al), tungsten (W), titanium (Ti),tantalum (Ta), molybdenum (Mo), nickel (Ni), platinum (Pt), copper (Cu),gold (Au), silver (Ag), manganese (Mn), neodymium (Nd), carbon (C),silicon (Si), or the like. Alternatively, an alloy containing theabove-described metal as a main component or a compound containing theabove-described metal can also be used. The conductive films 725 to 732can be either a single layer of the above-described metal film or aplurality of stacked layers thereof.

As an example of an alloy containing aluminum as a main component, analloy which contains aluminum as a main component and nickel can begiven. Further, an alloy which contains aluminum as a main component andcontains nickel and one or both of carbon and silicon can also be given.Aluminum and aluminum silicon, which have a low resistance value and areinexpensive, are the most suitable materials for formation of theconductive films 725 to 732. In particular, when an aluminum silicon(Al—Si) film is used, generation of hillocks in resist baking can besuppressed more than the case of using an aluminum film, in patterningthe conductive films 725 to 732. Further, instead of silicon (Si), Cumay be mixed into an aluminum film at about 0.5 wt. %.

Each of the conductive films 725 to 732 may be formed to have a stackedstructure of, for example, a barrier film, an aluminum silicon (Al—Si)film, and a barrier film, or a stacked structure of a barrier film, analuminum silicon (Al—Si) film, a titanium nitride film, and a barrierfilm. Note that a barrier film is a film formed using titanium, anitride of titanium, molybdenum, or a nitride of molybdenum. Whenbarrier films are formed to sandwich an aluminum silicon (Al—Si) filmtherebetween, generation of hillocks of aluminum or aluminum silicon canbe prevented more effectively. Further, when a barrier film is formedusing titanium, which is a highly reducible element, even if a thinoxide film is formed over the island-shaped semiconductor films 705 to708, the oxide film is reduced by titanium contained in the barrier filmso that good contact between the conductive films 725 to 732 and theisland-shaped semiconductor films 705 to 708 can be obtained.Alternatively, a plurality of barrier films may be stacked to be used.In that case, the conductive films 725 to 732 can each have a five-layerstructure in which titanium, titanium nitride, aluminum silicon,titanium, and titanium nitride are sequentially stacked from the bottom.

The conductive films 725 and 726 are connected to high concentrationimpurity regions 715 of the n-channel TFT 709. The conductive films 727and 728 are connected to high concentration impurity regions 716 of then-channel TFT 710. The conductive films 729 and 730 are connected tohigh concentration impurity regions 717 of the n-channel TFT 711. Theconductive films 731 and 732 are connected to high-concentrationimpurity regions 718 of the n-channel TFT 712.

As shown in FIG. 12B, after forming a protective layer 740 over theinsulating film 714 so as to cover the conductive films 725 to 732, asheet material 741 is attached to the protective layer 740. Theprotective layer 740 is formed of a material by which the insulatingfilm 714 and the conductive film 725 to 732 can be protected at the timeof separating the substrate 700 with the separation layer 702 used as aboundary later. For example, the protective layer 740 can be formed byapplying an epoxy-based, acrylate-based, or silicone-based resin that issoluble in water or alcohols over the entire surface.

In this embodiment, the protective layer 740 is formed in the followingmanner: a water-soluble resin (manufactured by Toagosei Co., Ltd.:VL-WSHL10) is applied to a thickness of 30 μm over the insulating film714 and the conductive films 725 to 732 by a spin coating method andexposed for 2 minutes so that it is temporarily hardened. Then, theresin is exposed to UV light for a total of 12.5 minutes, including 2.5minutes of exposure from a back surface and 10 minutes of exposure froma front surface, to fully harden the resin and thus form the protectivelayer 740. Further, in the case of stacking a plurality of organicresins, depending on a solvent used, the stacked organic resins might bepartly melted or adhesiveness might become too high during applicationor baking. Therefore, in the case where organic resins that are solublein the same solvent are used for the insulating film 714 and theprotective layer 740, it is preferable to form an inorganic insulatingfilm (e.g., a silicon nitride film, a silicon nitride oxide film, anAlN_(x) film, or an AlN_(x)O_(y) film) so as to cover the insulatingfilm 714 in order that the protective layer 740 can be smoothly removedin a later step.

Next, as shown in FIG. 12C, a layer of from the insulating film 703 upto the conductive films 725 to 732 formed over the insulating film 714,which includes semiconductor elements typified by TFTs and variousconductive films, (hereinafter referred to as an “element layer 742”),the protective layer 740, and the sheet material 741 are separated fromthe substrate 700. In this embodiment, the element layer 742 and theprotective layer 740 are separated from the substrate 700 by physicalforce. The separation layer 702 does not need to be completely removedand may be partly left. The separation above can be performed by beingpulled by a human hand or a gripping tool, or by being detached whilerolling a roller thereon.

In this embodiment, although a separation step in which the metal oxidefilm is used as the separation layer to separate the element layer 742by a physical method is performed, a separation step performed in thepresent invention is not limited thereto. For example, the substrate 700having a light-transmitting property may be used and amorphous siliconcontaining hydrogen may be used as the separation layer 702 in orderthat the separation layer 702 is irradiated with a laser beam from thesubstrate 700 side to vaporize the hydrogen contained in amorphoussilicon and separate the substrate 700 from the element layer 742.

As the above-described separation step, a method of etching theseparation layer 702 may be performed. In this case, a groove is formedso as to partly expose the separation layer 702. The groove is formed bydicing, scribing, processing using laser light including UV light, aphotolithography method, or the like. It is only necessary that thegroove be deep enough to expose the separation layer 702. A halogenfluoride is used as an etching gas, and the gas is introduced throughthe groove. In this embodiment, for example, ClF₃ (chlorine trifluoride)is used for etching in accordance with the following condition: atemperature of 350° C., a flow rate of 300 sccm, a pressure of 800 Pa,and a processing time of 3 hours. In addition, nitrogen may be mixedinto the ClF₃ gas. Using halogen fluoride such as ClF₃ enables theseparation layer 702 to be etched as selected, so that the substrate 700can be separated from the element formation layer 742. Further, thehalogen fluoride may be either a gas or a liquid.

The element layer 742 can be separated from the substrate 700 by aremoving method in which a substrate is mechanically polished or aremoving method in which a substrate is dissolved by a solution such asHF. In this case, the separation layer 702 is not necessary.

Next, as shown in FIG. 13A, a supporting substrate 743 is attached to asurface on the side which is exposed by the separation of the elementlayer 742. Then, after the element layer 742 and the protective layer740 are separated from the sheet material 741, the protective layer 740is removed.

As the supporting substrate 743, for example, a glass substrate such asbarium borosilicate glass, or aluminoborosilicate glass, a flexibleorganic material such as paper or plastic can be used. Alternatively, asthe supporting substrate 743, a flexible inorganic material can be used.The plastic substrate may be made of ARTON including poly-norbornenethat has a polar group (manufactured by JSR). In addition, polyestertypified by polyethylene terephthalate (PET); polyether sulfone (PES);polyethylene naphthalate (PEN); polycarbonate (PC); polyamide resin;polyether etherketone (PEEK); polysulfone (PSF); polyether imide (PEI);polyarylate (PAR); polybutylene terephthalate (PBT); polyimide; anacrylonitrile butadiene styrene resin; poly vinyl chloride;polypropylene; poly vinyl acetate; an acrylic resin; and the like can begiven.

Next, a conductive film which is to be a pixel electrode 745 later isformed so as to cover the insulating film 714 and the conductive films725 to 732. In this embodiment, the light-transmitting conductive filmis formed from indium tin oxide containing silicon oxide (ITSO) by asputtering method. As well as ITSO, a light-transmitting oxideconductive material other than ITSO, such as indium tin oxide (ITO),zinc oxide (ZnO), indium zinc oxide (IZO), or gallium-doped zinc oxide(GZO) may be used for the conductive film. Alternatively, as theconductive film, other than the above-described light-transmitting oxideconductive material, a single-layer film containing one or more oftitanium nitride, zirconium nitride, Ti, W, Ni, Pt, Cr, Ag, Al, and thelike, a stacked layer of a titanium nitride film and a film containingaluminum as a main component, a three-layer structure of a titaniumnitride film, a film containing aluminum as a main component, and atitanium nitride film, or the like can be used. Note that in the casewhere light is extracted from the pixel electrode 745 side by using amaterial other than the light-transmitting oxide conductive material,the conductive material is formed to a thickness (preferablyapproximately 5 nm to 30 nm) which lets light transmits through theconductive film.

In the case where ITSO is used, a target in which silicon oxide iscontained in ITO at 2 wt. % to 10 wt. % can be used. Specifically, inthis embodiment, by using a target in which In₂O₃, SnO₂, and SiO₂ arecontained at a wt. % ratio of 85:10:5, the conductive film is formed toa thickness of 105 nm, with a flow rate of Ar at 50 sccm, a flow rate ofO₂ at 3 sccm, a sputtering pressure of 0.4 Pa, a sputtering power of 1kW, and a deposition rate of 30 nm/min.

A conductive composition including a conductive high molecule (alsoreferred to as a conductive polymer) can be used for the conductive filmwhich is to be the pixel electrode 745. The conductive compositionpreferably has sheet resistance of equal to or less than 10000 Ω/squareand light transmittance of equal to or higher than 70% at a wavelengthof 550 nm. Further, resistance of a conductive high molecule which isincluded in the conductive composition is preferably equal to or lowerthan 0.1 Ω·cm.

As a conductive high molecule, so-called π electron conjugatedconductive high molecule can be used. For example, as π electronconjugated conductive high molecule, polyaniline and/or a derivativethereof, polypyrrole and/or a derivative thereof, polythiophene and/or aderivative thereof, and a copolymer of two or more kinds of thosematerials can be given.

Specific examples of a conjugated conductive high molecule are givenbelow: polypyrrole, poly(3-methylpyrrole), poly(3-butylpyrrole),poly(3-octylpyrrole), poly(3-decylpyrrole), poly(3,4-dimethylpyrrole),poly(3,4-dibutylpyrrole), poly(3-hydroxypyrrole),poly(3-methyl-4-hydroxypyrrole), poly(3-methoxypyrrole),poly(3-ethoxypyrrole), poly(3-octoxypyrrole), poly(3-carboxylpyrrole),poly(3-methyl-4-carboxylpyrrole), polyN-methylpyrrole, polythiophene,poly(3-methylthiophene), poly(3-butylthiophene), poly(3-octylthiophene),poly(3-decylthiophene), poly(3-dodecylthiophene),poly(3-methoxythiophene), poly(3-ethoxythiophene),poly(3-octoxythiophene), poly(3-carboxylthiophene),poly(3-methyl-4-carboxylthiophene), poly(3,4-ethylenedioxythiophene),polyaniline, poly(2-methylaniline), poly(2-octylaniline),poly(2-isobutylaniline), poly(3-isobutylaniline), poly(2-anilinesulfonicacid), or poly(3-anilinesulfonic acid).

Any of the foregoing conductive high molecules may be used alone for thepixel electrode 745 as a conductive composition. Alternatively, any ofthe foregoing conductive high molecules can be used with an organicresin added thereto to adjust film characteristics such as uniformity ofthe thickness of a conductive composition film and the intensity of thefilm of a conductive composition.

As for the organic resin, as long as a resin is compatible with aconductive high molecule or a resin can be mixed and dispersed into aconductive high molecule, a thermosetting resin, a thermoplastic resin,or a photocurable resin may be used. For example, a polyester-basedresin such as polyethylene terephthalate, polybutylene terephthalate, orpolyethylene naphthalate; a polyimide-based resin such as polyimide orpolyimide amide; a polyamide resin such as polyamide 6, polyamide 66,polyamide 12, or polyamide 11; a fluorine resin such as poly(vinylidenefluoride), polyvinyl fluoride, polytetrafluoroethylene,ethylene-tetrafluoroethylene copolymer, or polychlorotrifluoroethylene;a vinyl resin such as poly(vinyl alcohol), poly(vinyl ether), poly(vinylbutyral), poly(vinyl acetate), or polyvinyl chloride; an epoxy resin; axylene resin; an aramid resin; a polyurethane-based resin; apolyurea-based resin, a melamine resin; a phenol-based resin; polyether;an acrylic-based resin, or a copolymer of any of those resins.

Further, a conductive composition may be doped with an acceptor dopantor a donor dopant so that oxidation-reduction potential of a conjugatedelectron in a conjugated conductive high molecule may be changed inorder to adjust conductivity of the conductive composition.

As an acceptor dopant, a halogen compound, a Lewis acid, a protonicacid, an organic cyano compound, an organic metal compound, or the likecan be used. Examples of a halogen compound are chlorine, bromine,iodine, iodine chloride, iodine bromide, and iodine fluoride. Examplesof a Lewis acid are phosphorus pentafluoride, arsenic pentafluoride,antimony pentafluoride, boron trifluoride, boron trichloride, and borontribromide. Examples of a protonic acid are inorganic acid such ashydrochloric acid, sulfuric acid, nitric acid, phosphoric acid,fluoroboric acid, hydrofluoric acid, and perchloric acid, and organicacid such as organic carboxylic acid and organic sulfonic acid. Asorganic carboxylic acid and organic sulfonic acid, a organic carboxylicacid compound and an organic sulfonic acid compound can be used. As anorganic cyano compound, a compound having two or more cyano groups in aconjugated bonding, for example, tetracyanoethylene, tetracyanoethyleneoxide, tetracyanobenzene, tetracyanoquinodimethane, andtetracyanoazanaphthalene are given.

As a donor dopant, alkali metal, alkaline earth metal, a quaternaryamine compound, or the like can be used.

A conductive composition is dissolved in water or an organic solvent(e.g., an alcohol-based solvent, a ketone-based solvent, an ester-basedsolvent, a hydrocarbon-based solvent, an aromatic-based solvent) so thata thin film which is to be the pixel electrode 745 can be formed by awet process.

There are no particular limitations on kinds of solvent which dissolvesa conductive composition. A solvent which dissolves the foregoingconductive high molecules and high molecular resin compounds such as anorganic resin may be used. For example, a conductive composition may bedissolved in any one of or mixture of water, methanol, ethanol,Propylene carbonate, N-methylpyrrolidone, dimethylformamide,dimethylacetamide, cyclohexanone, acetone, methyl ethyl ketone, methylisobutyl ketone, or toluene.

After the conductive composition is dissolved in a solvent as describedabove, a film thereof can be formed by a wet process, such as anapplication method, a coating method, a droplet discharge method (alsoreferred to as an inkjet method), or a printing method. The solvent maybe dried with thermal treatment or may be dried under reduced pressure.In the case where the organic resin is a thermosetting resin, thermaltreatment may be further performed. In the case where the organic resinis a photocurable resin, light irradiation treatment may be performed.

After the conductive film is formed, the surface thereof may be polishedby a CMP method, cleaning with a polyvinyl alcohol series porous body,or the like so as to flatten the surface.

Next, as shown in FIG. 13B, the conductive film is patterned to form thepixel electrode 745 which is connected to the conductive film 732. Apartition wall 750 including opening portions is formed over theinsulating film 714 so as to cover the conductive films 725 to 732 andpart of the pixel electrode 745. Part of the pixel electrode 745 isexposed in the opening portion of the partition wall 750. The partitionwall 750 can be formed by an organic resin film, an inorganic insulatingfilm, or a siloxane-based insulating film. For example, acrylic,polyimide, polyamide, or the like can be used as the organic resin film,and silicon oxide, silicon nitride oxide, or the like can be used as theinorganic insulating film. In particular, by using a photosensitiveorganic resin film as the partition wall 750 and forming openingportions over the pixel electrode 745 so as to make side walls of theopening portions have inclined surfaces of consecutive curvature, thepixel electrode 745 and a common electrode 746 which is to be formedlater can be prevented from being connected to each other. In this case,a mask can be formed by a droplet discharge method or a printing method.Meanwhile, the partition wall 750 itself can be formed by a dropletdischarge method or a printing method.

Next, before an electroluminescent layer 751 is formed, thermaltreatment under an atmosphere or thermal treatment (vacuum bake) under avacuum atmosphere is performed to remove moisture, oxygen, or the likeadsorbed in the partition wall 750 and the pixel electrode 745.Specifically, thermal treatment is performed on a substrate at 200° C.to 450° C., preferably 250° C. to 300° C. for approximately 0.5 to 20hours in a vacuum atmosphere. Pressure is preferably equal to or lowerthan 3×10⁻⁷ Torr, and 3×10⁻⁸ Torr is most preferable if possible.Further, in the case where the electroluminescent layer 751 is formedafter thermal treatment is performed in a vacuum atmosphere, thereliability can be further improved by putting the substrate in thevacuum atmosphere just before completion of formation of theelectroluminescent layer 751. Further, the pixel electrode 745 may beirradiated with ultraviolet rays before or after the vacuum baking.

The electroluminescent layer 751 is formed so as to be in contact withthe pixel electrode 745 through the opening portions of the partitionwall 750. The electroluminescent layer 751 may be either a single-layerstructure or a stacked structure of a plurality of layers. Not only anorganic material but also an inorganic material may be included in eachlayer. The luminescence in the electroluminescent layer 751 includeslight emission (fluorescence) which is obtained in returning from asinglet-excited state to a ground state, and light emission(phosphorescence) which is obtained in returning from a triplet-excitedstate to a ground state. In the case where the electroluminescent layer751 is formed of a plurality of layers, an electron injecting layer, anelectron transporting layer, a light-emitting layer, a hole transportinglayer, and a hole injecting layer are stacked in this order over thepixel electrode 745 which corresponds to a cathode. Note that when thepixel electrode 745 corresponds to an anode, the electroluminescentlayer 751 is formed by stacking a hole injecting layer, a holetransporting layer, a light-emitting layer, an electron transportinglayer, and an electron injecting layer in this order.

Alternatively, the electroluminescent layer 751 can be formed by usingany of a high molecular organic compound, an intermediate molecularorganic compound (an organic compound having no sublimation property, inwhich the length of a chain of molecules is equal to or less than 10μm), a low molecular organic compound, and an inorganic compound bydroplet discharge method. Moreover, the intermediate molecular organiccompound, the low molecular organic compound, and the inorganic compoundcan be formed by a vapor deposition method.

The common electrode 746 is formed so as to cover the electroluminescentlayer 751. As the common electrode 746, a metal, an alloy, an electricalconductive compound, a mixture thereof having a small work function, orthe like can be typically used. Specifically, an alkali metal such as Lior Cs, an alkaline earth metal such as Mg, Ca, or Sr, an alloycontaining them (e.g., Mg:Ag or A1:Li), or a rare earth metal such as Ybor Er can be formed as well. Further, by formation of a layer containinga material having high electron injection properties so as to be incontact with the common electrode 746, a normal conductive film formedof aluminum, a light-transmitting oxide conductive material, or the likecan be used as well.

A light-emitting element 760 is formed by overlap of the pixel electrode745, the electroluminescent layer 751, and the common electrode 746 inthe opening portion in the partition wall 750.

Note that light from the light-emitting element 760 can be extractedfrom the pixel electrode 745 side, the common electrode 746 side, orboth sides. In accordance with an objective structure among the threestructures described above, a material and a thickness of each of thepixel electrode 745 and the common electrode 746 is selected. In thecase where light is extracted from the common electrode 746 side as inthis embodiment, higher luminance can be obtained with lower powerconsumption than that in the case where light is extracted from thepixel electrode 745 side.

Note that an insulating film may be formed over the common electrode 746after the formation of the light-emitting element 760. The insulatingfilm is formed of a film which transmits a less substance that causespromotion in deterioration of a light-emitting element, such as moistureor oxygen compared with another insulating film. Typically, a DLC film,a carbon nitride film, a silicon nitride film formed by an RF sputteringmethod, or the like is preferably used. Further, the above-describedfilm through which a matter which causes increase of deterioration of alight-emitting element such as moisture or oxygen penetrates in lesseramount and a film through which the matter such as moisture or oxygenpenetrates in more amount may be stacked to be used as theabove-described insulating film as well.

In practice, when a process is completed up to and including FIG. 13B,packaging (filling and sealing) is preferably performed by using aprotective film (a laminating film, an ultraviolet curable resin film,or the like) which has small degas and high airtightness so as not to befurther exposed to the outside air, or a cover member.

Through the above-described process, a display device of the presentinvention is manufactured.

Note that this embodiment shows an example in which the element layer742 is used by being separated from the substrate 700; however, theaforementioned element layer 742 is formed over the substrate 700without providing the separation layer 702, and may be used as a displaydevice.

Note that this embodiment describes with a thin film transistor as anexample; however, the present invention is not limited thereto. As wellas a thin film transistor, a transistor formed using single-crystalsilicon, a transistor formed using SOI, or the like can be used.Alternatively, a transistor using an organic semiconductor, and atransistor using a carbon nanotube may be used.

This embodiment can be implemented by being combined as appropriate withany of the above-described embodiment modes.

[Embodiment 2]

In this embodiment, a manufacturing method of a display device of thepresent invention, in which a semiconductor element is formed by using asemiconductor film which is transferred from a semiconductor substrate(a bond substrate) to a supporting substrate (a base substrate), will bedescribed.

First, as shown in FIG. 14A, an insulating film 901 is formed over abond substrate 900. The insulating film 901 is formed using aninsulating material such as silicon oxide, silicon nitride oxide, orsilicon nitride. The insulating film 901 can be either a singleinsulating film or stacked layers of a plurality of insulating films.For example, in this embodiment, the insulating film 901 is used inwhich, from the bond substrate 900 side, silicon nitride oxide in whichthe amount of oxygen is higher than that of nitrogen, and siliconnitride oxide in which the amount of nitrogen is higher than that ofoxygen are stacked.

For example, in the case of using silicon oxide as the insulating film901, the insulating film 901 can be formed using a mixed gas of silaneand oxygen, a mixed gas of TEOS (tetraethoxysilane) and oxygen, or thelike by a vapor deposition method such as thermal CVD, plasma CVD,atmospheric pressure CVD, or bias ECRCVD. In this case, the surface ofthe insulating film 901 may be densified with oxygen plasma treatment.In the case of using silicon nitride as the insulating film 901, theinsulating film 901 can be formed using a mixed gas of silane andammonium by a vapor deposition method such as plasma CVD. In addition,in the case of using silicon nitride oxide as the insulating film 901,the insulating film 901 can be formed using a mixed gas of silane andammonium or a mixed gas of silane and nitrogen oxide by a vapordeposition method such as plasma CVD.

Alternatively, the insulating film 901 may be formed using silicon oxidewhich is formed with the use of an organic silane gas by a chemicalvapor deposition method. Examples of organic silane gas that can be usedinclude silicon-containing compounds, such as tetraethoxysilane (TEOS)(chemical formula: Si(OC₂H₅)₄), tetramethylsilane (TMS) (chemicalformula: Si(CH₃)₄), tetramethylcyclotetrasiloxane (TMCTS),octamethylcyclotetrasiloxane (OMCTS), hexamethyldisilazane (HMDS),triethoxysilane (chemical formula: SiH(OC₂H₅)₃), andtrisdimethylaminosilane (chemical formula: SiH(N(CH₃)₂)₃).

Next, as shown in FIG. 14A, hydrogen or a rare gas, or hydrogen ions orrare gas ions is introduced into the bond substrate 900 as indicated byarrows, whereby a defect layer 902 having very small voids is formed ina region at a certain depth from a surface of the bond substrate 900.The position where the defect layer 902 is formed is determineddepending on acceleration voltage at the time of the above-describedintroduction. The thickness of a semiconductor film 908 which istransferred from the bond substrate 900 to the base substrate 904 isdetermined by the position of the defect layer 902; therefore,acceleration of the voltage at the time of the introduction is performedin consideration of the thickness of the semiconductor film 908. Thesemiconductor film 908 is formed to a thickness of 10 nm to 200 nm,preferably 10 nm to 50 nm. For example, in the case where hydrogen isintroduced into the bond substrate 900, the dose is desirably 1×10¹⁶/cm²to 1×10¹⁷/cm².

Note that, in some cases, in the step of forming the defect layer 902,hydrogen or a rare gas, or hydrogen ions or rare gas ions is introducedinto the bond substrate 900 at high concentration, and accordingly asurface of the bond substrate 900 may become rough and sufficient bondstrength for attachment between the base substrate 904 and the bondsubstrate 900 may not be able to be obtained. The insulating film 901 isprovided, whereby the surface of the bond substrate 900 is protected atthe time of the introduction of hydrogen or a rare gas, or hydrogen ionsor rare gas ions, and the base substrate 904 and the bond substrate 900can be bonded to each other well.

Next, as shown in FIG. 14B, an insulating film 903 is formed over theinsulating film 901. Like the insulating film 901, the insulating film903 is formed using an insulating material such as silicon oxide,silicon nitride oxide, or silicon nitride. The insulating film 903 canbe either a single insulating film or stacked layers of a plurality ofinsulating films. Alternatively, the insulating film 903 may be formedusing silicon oxide which is formed with the use of an organic silanegas by a chemical vapor deposition method. In this embodiment, theinsulating film 903 may be formed using silicon oxide which is formedwith the use of an organic silane gas by a chemical vapor depositionmethod.

When an insulating film with a high barrier property, such as siliconnitride or silicon nitride oxide, is used as the insulating film 901 orthe insulating film 903, impurities such as an alkali metal or analkaline earth metal included in the base substrate 904 can be preventedfrom entering into a semiconductor film 909 which is to be formed later.

Note that in this embodiment, although the insulating film 903 is formedafter the defect layer 902 is formed, the insulating film 903 is notalways necessary. However, since the insulating film 903 is formed afterthe defect layer 902 is formed, flatness of the surface of theinsulating film 903 is higher than that of the insulating film 901 whichis formed before the defect layer 902 is formed. Therefore, when theinsulating film 903 is formed, bonding to be performed later can befurther strengthened.

Next, before the bond substrate 900 and the base substrate 904 areattached to each other by bonding, hydrogenation may be performed on thebond substrate 900. The hydrogenation is performed for example, at 350°C. for approximately two hours in a hydrogen atmosphere.

Next, as shown in FIG. 14C, the bond substrate 900 is stacked over thebase substrate 904 so that the insulating film 903 is interposedtherebetween. Then, the bond substrate 900 and the base substrate 904are attached to each other, as shown in FIG. 14D. The insulating film903 is bonded to the base substrate 904, whereby the bond substrate 900and the base substrate 904 are attached to each other.

The bond substrate 900 and the base substrate 904 are bonded to eachother by van der Waals forces, so that they are firmly bonded to eachother even at room temperature. Note that since the above-describedbonding can be performed at a low temperature, various substrates can beused for the base substrate 904. As the base substrate 904, for example,a substrate such as a quartz substrate or a sapphire substrate can beused as well as a glass substrate made of aluminosilicate glass, bariumborosilicate glass, aluminoborosilicate glass. Furthermore, as the basesubstrate 904, a semiconductor substrate formed of silicon, galliumarsenide, indium phosphide, or the like can be used.

Note that an insulating film is also formed over the surface of the basesubstrate 904 and the insulating film may be bonded to the insulatingfilm 903. In this case, as the base substrate 904, a metal substratesuch as a stainless-steel substrate can be used as well as what givenabove can be used. A substrate formed of a synthetic resin which hasflexibility, such as plastic, generally tends to have lower allowabletemperature limit than that of the above substrates; however, thesubstrate can be used as the base substrate 904 as long as it can resista processing temperature in a manufacturing process. As a plasticsubstrate, polyester typified by polyethylene terephthalate (PET),polyether sulfone (PES), polyethylene naphthalate (PEN), polycarbonate(PC), polyether etherketone (PEEK), polysulfone (PSF), polyether imide(PEI), polyarylate (PAR), polybutylene terephthalate (PBT), polyimide,an acrylonitrile-butadiene-styrene resin, polyvinyl chloride,polypropylene, polyvinyl acetate, an acrylic resin, and the like aregiven.

As the bond substrate 900, a single crystal semiconductor substrate ofsilicon, germanium, or the like or a polycrystalline semiconductorsubstrate of silicon, germanium, or the like can be used. In addition, asingle crystal semiconductor substrate or a polycrystallinesemiconductor substrate formed of a compound semiconductor such asgallium arsenide or indium phosphide can be used as the bond substrate900. In addition, as the bond substrate 900, a semiconductor substrateformed of silicon having lattice distortion, silicon germanium in whichgermanium is added to silicon, or the like may also be used. Siliconhaving lattice distortion can be formed by formation of silicon onsilicon germanium or silicon nitride which has larger lattice constantthan silicon.

Note that thermal treatment or pressure treatment may be performed afterthe base substrate 904 and the bond substrate 900 are attached to eachother. The bond strength can be increased with thermal treatment orpressure treatment.

Thermal treatment is performed after the above-mentioned bonding,thereby the adjacent microvoids in the defect layer 902 are coupled andthe volume of the microvoid is increased. As a result, as shown in FIG.15A, the bond substrate 900 is split along the defect layer 902; thus,the semiconductor film 908 which has been part of the bond substrate 900is separated from the bond substrate 900. The thermal treatment ispreferably performed at a temperature that is equal to or lower than theallowable temperature limit of the base substrate 904. For example,thermal treatment may be performed at a temperature ranging from 400° C.to 600° C. This separation transfers the semiconductor film 908 togetherwith the insulating film 901 and the insulating film 903 to the basesubstrate 904. After that, thermal treatment at a temperature rangingfrom 400° C. to 600° C. is preferably performed in order to bond theinsulating film 903 and the base substrate 904 to each other morestrongly.

Crystalline orientation of the semiconductor film 908 can be controlledwith the plane orientation of the bond substrate 900. The bond substrate900 having crystalline orientation which is suitable for a semiconductorelement which is to be formed may be selected as appropriate. Mobilityof the transistor differs depending on the crystalline orientation ofthe semiconductor film 908. When a transistor with higher mobility isdesired to be obtained, the direction of bonding of the bond substrate900 is set in consideration of the direction of a channel and thecrystalline orientation.

Next, the surface of the semiconductor film 908 transferred isflattened. Although the flattening is not necessarily essential, theflattening makes it possible to improve characteristics of the interfacebetween the semiconductor film 908 and a gate insulating film in thetransistor which is to be formed later. Specifically, the flattening canbe performed by chemical mechanical polishing (CMP). The thickness ofthe semiconductor film 908 is reduced by the above-described flattening.

Note that although the case where a Smart Cut® method is used in whichthe semiconductor film 908 is separated from the bond substrate 900 bythe defect layer 902 is described in this embodiment, the semiconductorfilm 908 may be attached to the base substrate 904 by another bondingmethod such as ELTRAN (epitaxial layer transfer), a dielectric isolationmethod, or a PACE (plasma assisted chemical etching) method.

Next, as shown in FIG. 15B, the semiconductor film 908 is processed(patterned) into a predetermined shape, so that island-shapedsemiconductor film 909 is formed.

The present invention makes it possible to form various semiconductorelements such as transistors with the use of the semiconductor film 909which is formed through the above-described steps. A transistor 910formed using the semiconductor film 909 is illustrated in FIG. 15C.

With the above-described manufacturing method, a semiconductor elementincluded in a display device of the present invention can bemanufactured.

This embodiment can be implemented in combination with any of theabove-described embodiment modes or the above-described embodiments asappropriate.

[Embodiment 3]

In this embodiment, the appearance of a display device of the presentinvention will be described with reference to FIGS. 16A and 16B. FIG.16A is a top view of a panel in which a transistor and a light-emittingelement formed over a first substrate is sealed between the firstsubstrate and a second substrate with a sealant. FIG. 16B is across-sectional view of the FIG. 16A along a line A-A′.

A sealant 4020 is formed so as to surround a pixel portion 4002, asignal line driver circuit 4003, a scanning line driver circuit 4004,and a reset line driver circuit 4030 which are formed over a firstsubstrate 4001. In addition, a second substrate 4006 is formed over thepixel portion 4002, the signal line driver circuit 4003, and thescanning line driver circuit 4004. Thus, the pixel portion 4002, thesignal line driver circuit 4003, the scanning line driver circuit 4004,and the reset line driver circuit 4030 are tightly sealed together witha filler 4007 between the first substrate 4001 and the second substrate4006 with the sealant 4020.

Each of the pixel portion 4002, the signal line driver circuit 4003, thescanning line driver circuit 4004, and the reset line driver circuit4030 which are formed over the first substrate 4001 has a plurality oftransistors. In FIG. 16B, a transistor 4008 included in the signal linedriver circuit 4003, a driving transistor 4009 included in the pixelportion 4002, and a transistor 4010 included in the reset line drivercircuit 4030 are illustrated.

A light-emitting element 4011 uses part of a wiring 4017 connected to asource region or a drain region of the driving transistor 4009 as apixel electrode. In addition, the light-emitting element 4011 includes acommon electrode 4012 and an electroluminescent layer 4013 as well asthe pixel electrode. The structure of the light-emitting element 4011 isnot limited to the one shown in this embodiment. The structure of thelight-emitting element 4011 may be appropriately changed in accordancewith the direction of light extracted from the light-emitting element4011, polarity of the driving transistor 4009 and the like.

Various signals and voltages supplied to the signal line driver circuit4003, the scanning line driver circuit 4004, the reset line drivercircuit 4030, or the pixel portion 4002 are not shown in thecross-sectional view in FIG. 16B; however, they are supplied from aconnection terminal 4016 via leading out wirings 4014 and 4015.

In this embodiment, the connecting terminal 4016 is formed of the sameconductive film as the common electrode 4012 of the light emittingelement 4011. In addition, the lead wiring 4014 is formed of the sameconductive film as the wiring 4017. The leading out wiring 4015 isformed using the same conductive film as gate electrodes included in thedriving transistor 4009, the transistor 4010, and the transistor 4008,respectively.

The connecting terminal 4016 is electrically connected to a terminal ofan FPC 4018 through an anisotropic conductive film 4019.

Note that the first substrate 4001 and the second substrate 4006 can beformed by using glass, metal (typically stainless-steel), ceramics, orplastic. Note that the second substrate 4006 positioned in the directionfor extracting light from the light-emitting element 4011 is required tohave a light-transmitting property. That is, the second substrate 4006is preferably formed by using a material having a light-transmittingproperty, such as a glass substrate, a plastic substrate, a polyesterfilm, or an acrylic film.

In addition, an ultraviolet curable resin or a thermoset resin can beused for the filler 4007 as well as inert gas such as nitrogen or argon.In this embodiment, an example in which nitrogen is used as the filler4007 is described.

This embodiment can be implemented in combination with any of theabove-described embodiment modes or the above-described embodiments asappropriate.

[Embodiment 4]

A display device of the present invention can be used as a displayportion included in a camera such as a video camera, or a digital stillcamera or an electronic device such as a mobile phone, a portable gamemachine, or an e-book reader. As an electronic device which can use thedisplay device of the present invention, a goggle display (a headmounted display), a navigation system, an audio reproducing device(e.g., a car audio or an audio component set), a laptop computer, animage reproducing device provided with a recording medium (typically adevice for reproducing a recording medium such as a digital versatiledisc (DVD) and having a display for displaying the reproduced image),and the like can be given. Specific examples of these electronic devicesare shown in FIGS. 17A to 17C.

FIG. 17A shows a mobile phone, which includes a main body 2101, adisplay portion 2102, an audio input portion 2103, an audio outputportion 2104, and operation keys 2015. When the display device of thepresent invention is used for the display portion 2102, a mobile phonewhich is capable of displaying clear images because of few variation inluminance is obtained.

FIG. 17B shows a video camera, which includes a main body 2601, adisplay portion 2602, a housing 2603, an external connection port 2604,a remote control receiving portion 2605, an image receiving portion2606, a battery 2607, an audio input portion 2608, operation keys 2609,an eyepiece portion 2610, and the like. When the display device of thepresent invention is used for the display portion 2602, a video camerawhich is capable of displaying clear images because of few variation inluminance is obtained.

FIG. 17C is an image display unit which includes a housing 2401, adisplay portion 2402, a speaker portion 2403, and the like. When thedisplay device of the present invention is used for the display portion2402, an image display unit which is capable of displaying clear imagesbecause of few variation in a luminance is obtained. Note that the imagedisplay unit includes all devices for displaying image such as for apersonal computer, for receiving TV broadcasting, and for displaying anadvertisement, or the like.

As described above, an application range of the present invention isextremely wide and the present invention can be applied to electronicdevices in various fields.

This embodiment can be implemented in combination with any of theabove-described embodiment modes or the above-described embodiments asappropriate.

This application is based on Japanese Patent Application serial no.2007-171484 filed with Japan Patent Office on Jun. 29, 2007, the entirecontents of which are hereby incorporated by reference.

1. A semiconductor device comprising: a transistor; a capacitor; a firstswitching device, a second switching device, and a third switchingdevice; wherein a first terminal of the transistor is electricallyconnected to a first line, wherein a second terminal of the transistoris electrically connected to a first terminal of the third switchingdevice, wherein a gate of the transistor is electrically connected to asecond line through the second switching device, a first electrode ofthe capacitor, and the first terminal of the third switching device, andwherein a second electrode of the capacitor is electrically connected toa third line through the first switching device.
 2. The semiconductordevice according to claim 1, wherein the first line is applied a powersupply potential.
 3. The semiconductor device according to claim 1,wherein the second line is applied an initial potential.
 4. Thesemiconductor device according to claim 1, wherein the third line isapplied a potential of a video signal.
 5. The semiconductor deviceaccording to claim 1, wherein a second terminal of the third switchingdevice is electrically connected to a light emitting element.
 6. Thesemiconductor device according to claim 1, wherein at least one of thefirst switching device, the second switching device, and the thirdswitching device is a transistor.
 7. A semiconductor device comprising:a transistor; a capacitor; a first switching device, a second switchingdevice, a third switching device, and a fourth switching device; whereina first terminal of the transistor is electrically connected to a firstline, wherein a second terminal of the transistor is electricallyconnected to a first terminal of the third switching device and a firstterminal of the fourth switching device, wherein a gate of thetransistor is electrically connected to a second line through the secondswitching device, a first electrode of the capacitor, and a secondterminal of the fourth switching device, and wherein a second electrodeof the capacitor is electrically connected to a third line through thefirst switching device.
 8. The semiconductor device according to claim7, wherein the first line is applied a power supply potential.
 9. Thesemiconductor device according to claim 7, wherein the second line isapplied an initial potential.
 10. The semiconductor device according toclaim 7, wherein the third line is applied a potential of a videosignal.
 11. The semiconductor device according to claim 7, wherein asecond terminal of the third switching device is electrically connectedto a light emitting element.
 12. The semiconductor device according toclaim 7, wherein at least one of the first switching device, the secondswitching device, the third switching device and the fourth switchingdevice is a transistor.